Defect Tailoring in HfO2/Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation

Featured Application HfO2 films are of capital importance in microelectronics as high-k dielectrics in thin film transistors but also have increasing applications in the photocatalytic photodegradation of pollutants and photocatalytic hydrogen generation. Therefore, the description and control of its electronic properties after deposition and post-deposition treatments are fundamental for future device performance.Abstract In the present work, a study of the structural defects in HfO2 thin films deposited by dip-coating on p-type silicon substrates treated under different conditions, such as air-annealing, ultraviolet irradiation, and simultaneous annealing-UV irradiation, is presented. HfO2 thin films were analyzed by grazing incidence X-ray diffraction, Raman spectroscopy, optical fluorescence, atomic force microscopy, and UV-Vis diffuse reflectance. Films treated at 200 degrees C and 350 degrees C present peaks corresponding to monoclinic HfO2. After UV treatment, the films became amorphous. The combination of annealing at 350 degrees C with UV treatment does not lead to crystalline peaks, suggesting that UV treatment causes extensive structural damage. Fluorescence spectroscopy and UV-Vis spectroscopy suggest that films present oxygen vacancies as their main structural defects. A reduction in oxygen vacancies after the second thermal treatment was observed, but in contrast, after UV irradiation, fluorescence spectroscopy indicated that more defects are created within the mobility gap, irrespective of the simultaneous annealing at 350 degrees C. An electronic band diagram was proposed assigning the observed fluorescence bands and optical transitions, which, in turn, explain the electrical properties of the films. The results suggest that the electronic structure of HfO2 films can be tailored with a careful choice of thermal annealing conditions along with the controlled creation of defects using UV irradiation, which could open the way to multiple applications of the materials either in microelectronics, optoelectronics, as well as in photocatalytic/electrocatalytic applications such as photodegradation and hydrogen generation.