Fabrication of Porous SiC Coatings on Quartz Substrates by Laser Chemical Vapor Deposition

被引：0
作者：
Yang, Meijun [1 ]
Chen, Rui [2 ]
Xu, Qingfang [1 ]
Guo, Bingjian [2 ]
Liu, Kai [2 ]
Tu, Rong [1 ]
Zhang, Song [1 ]
机构：
[1] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China
[2] Wuhan Univ Technol, Sch Mat Sci & Engn, Wuhan 430070, Peoples R China
来源：
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION | 2025年 / 40卷 / 02期
基金：
对外科技合作项目（国际科技项目）; 中国国家自然科学基金;
关键词：
laser etching; laser CVD; quartz substrate; SiC coating; CARBIDE THIN-FILMS; TEMPERATURE; GROWTH; CVD;
D O I：
10.1007/s11595-025-3068-x
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Laser etching and laser chemical vapor deposition (LCVD) techniques were proposed for the rapid preparation of high-purity, strongly bonded SiC porous micro-nano-coatings on quartz substrates. The laser serves as an external driving force for the vertical growth of SiC whiskers, facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world. The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress. It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.
引用
收藏
页码：330 / 337
页数：8
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