A Fault-Detection Method of MEMS Micromirrors with Hysteresis

被引：0
|
作者：
Tan, Yonghong [1 ]
Li, Xinyuan [1 ]
Ke, Changzhong [2 ]
Dong, Ruili [2 ]
Gu, Ya [1 ]
Tan, Qingyuan [3 ]
机构：
[1] Shanghai Normal Univ, Coll Mech & Elect Engn, Shanghai 200234, Peoples R China
[2] Donghua Univ, Coll Informat Sci & Technol, Shanghai 201620, Peoples R China
[3] Univ Windsor, Dept Elect & Comp Engn, Windsor, ON, Canada
来源：
2024 IEEE 18TH INTERNATIONAL CONFERENCE ON CONTROL & AUTOMATION, ICCA 2024 | 2024年
基金：
中国国家自然科学基金;
关键词：
SYSTEMS;
D O I：
10.1109/ICCA62789.2024.10591867
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Electromagnetic scanning micromirror (EMSM) is a micro-electro -mechanical system (MEMS) chip used as an actuator in precision instruments. In this paper, the failure modes of the EMSM are briefly investigated. In order to suppress the effect of random noise and non-smooth hysteresis, a non-smooth dynamic state estimator (NSDSE) is proposed to estimate the states of the EMSM chip. Then, the stability of the NSDSE system is studied. Afterward, the fault detection method using the proposed NSDSE are presented. Finally, the experimental results are presented for validating the proposed fault detection method.
引用
收藏
页码：567 / 572
页数：6
相关论文
共 50 条
  • [1] MULTIPLE FAULT-DETECTION IN A PLA BY A SINGLE FAULT-DETECTION TEST
    LJULKIN, AE
    AVTOMATIKA I VYCHISLITELNAYA TEKHNIKA, 1982, (03): : 66 - 66
  • [2] METHOD OF SYNTHESIS OF CONTROL AUTOMATA WITH FAULT-DETECTION
    GOROZHIN, AD
    AVTOMATIKA I VYCHISLITELNAYA TEKHNIKA, 1978, (06): : 1 - 4
  • [3] Fault-detection method based on wavelet analysis
    Cheng, Geng-Guo
    Zhou, Feng-Xing
    Kongzhi yu Juece/Control and Decision, 2001, 16 (SUPPL.): : 828 - 830
  • [4] An Unsupervised Fault-Detection Method for Railway Turnouts
    Guo, Zijian
    Wan, Yiming
    Ye, Hao
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2020, 69 (11) : 8881 - 8901
  • [5] ANALYSIS OF INTEGRAL METHOD FOR FAULT-DETECTION IN TRANSFORMERS
    HIJAZI, MEA
    BASAK, A
    IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) : 3213 - 3215
  • [6] COMPUTER METHOD FOR FAULT-DETECTION IN COMBINATIONAL CIRCUITS
    RAI, S
    AGGARWAL, KK
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1979, 47 (03) : 247 - 251
  • [7] INSTRUMENT FAULT-DETECTION
    CLARK, RN
    IEEE TRANSACTIONS ON AEROSPACE AND ELECTRONIC SYSTEMS, 1978, 14 (03) : 456 - 465
  • [8] FAULT-DETECTION IN PLAS
    REGHBATI, HK
    IEEE DESIGN & TEST OF COMPUTERS, 1986, 3 (06): : 43 - 50
  • [9] FAULT-DETECTION AND RECOVERY
    HANSEN, RC
    PETERSON, RW
    WHITTINGTON, NO
    BELL SYSTEM TECHNICAL JOURNAL, 1983, 62 (01): : 349 - 365
  • [10] FAULT-DETECTION IN NETWORKS
    MATTSON, HF
    DISCRETE MATHEMATICS, 1992, 106 : 343 - 352
12345