Micro-Assembly Error Control of Specialized MEMS Friction Sensor

A skin friction sensor is a three-dimensional MEMS sensor specially designed for measuring the skin friction of hypersonic vehicle models. The accuracy of skin friction measurement under hypersonic laminar flow conditions is closely related to the fabrication and micro-assembly accuracy of MEMS skin friction sensors. In order to achieve accurate skin friction measurement, high-precision linear laser scanning ranging, multi-axis precision drive, and 3D reconstruction algorithms are investigated; a MEMS skin friction sensor micro-assembly height error measurement system is developed; and the MEMS skin friction sensor micro-assembly height error control method is carried out. The results show that the micro-assembly height error measurement of MEMS skin friction sensors achieves an accuracy of up to 2 mu m. The height errors of the MEMS skin friction sensor were controlled within -8 mu m to +10 mu m after error control. The angular errors were controlled within the range of 0.05-0.25 degrees, significantly improving micro-assembly accuracy in the height direction of the MEMS skin friction sensor. The results of hypersonic wind tunnel tests indicate that the deviation in the accuracy of the MEMS skin friction sensors after applying height error control is about 5%, and the deviation from the theoretical value is 8.51%, which indicates that height error control lays the foundation for improving the accuracy of skin friction measurement under hypersonic conditions.