Primary calibration method for laser Doppler vibrometers using electro-optical modulator

被引：0

作者：

Nozato, H. ^{[1
]}

Kokuyama, W. ^{[1
]}

Shimoda, T. ^{[1
]}

Inaba, H. ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Tsukuba, Ibaraki 3058563, Japan

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2025年 / 93卷

基金：

日本学术振兴会;

关键词：

Primary calibration; Frequency response; Heterodyne laser interferometer; Laser Doppler vibrometer; High-frequency; Electro-optical modulator; Accelerometer; INTERFEROMETRY;

D O I：

10.1016/j.precisioneng.2024.12.015

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, we propose a primary calibration method for laser Doppler vibrometers using an independent reference heterodyne laser interferometer and electro-optical modulator up to 1 MHz, and demonstrate its performance under the measurement uncertainties of velocity sensitivity and phase shift at different frequencies. To validate the proposed method, we compared its results with the comparison calibration results of a back-toback accelerometer. Consequently, we confirmed the reliability of the proposed primary calibration method within the expanded uncertainty range.

引用

页码：204 / 215

页数：12

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