High-Performance Thin-Film Lithium Niobate Mach-Zehnder Modulator on 8-Inch Silicon Substrate

被引：0

作者：

Zhou, Jingjie ^{[1
]}

Cong, Qingyu ^{[1
]}

Lv, Liming ^{[2
]}

Yao, Zhanshi ^{[3
]}

Zhu, Shiyang ^{[3
]}

Wang, Yuxi ^{[3
]}

Li, Zhaoyi ^{[1
]}

Fan, Zuowen ^{[1
]}

Zeng, Xianfeng ^{[4
]}

Hu, Ting ^{[1
]}

Jia, Lianxi ^{[1
,2
,4
]}

机构：

[1] Shanghai Univ, Sch Microelect, Shanghai, Peoples R China

[2] Shanghai Ind Technol Res Inst, Shanghai, Peoples R China

[3] Huawei Technol, B&P Lab, Shenzhen, Peoples R China

[4] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China

来源：

2024 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION, OFC | 2024年

关键词：

PHOTONICS; BREAKING; PLATFORM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We first report the thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulator (MZM) on an 8-inch silicon substrate fabricated in the back-end-of-line (BEOL) of CMOS foundry. It operates at 1550 nm with electro-optical response of only 1.5 dB roll-off at 67 GHz. (c) 2024 The Author(s)

引用

页数：3

共 48 条

[41] High-performance and fabrication-tolerant edge coupler on thin film lithium niobate based on a three-dimensional inverse taper [J].

Chen, Bin ;

Ruan, Ziliang ;

Wang, Mai ;

Gong, Shengqi ;

Liu, Liu .

APL PHOTONICS, 2024, 9 (11)

[42] Foundry-compatible thin film lithium niobate modulator with RF electrodes buried inside the silicon oxide layer of the SOI wafer [J].

Safian, Reza ;

Teng, Min ;

Zhuang, Leimeng ;

Chakravarty, Swapnajit .

OPTICS EXPRESS, 2020, 28 (18) :25843-25857

[43] Machine-Learning-Assisted Instantaneous Frequency Measurement Method Based on Thin-Film Lithium Niobate on an Insulator Phase Modulator for Radar Detection [J].

Jia, Qianqian ;

Xiang, Zichuan ;

Li, Dechen ;

Liu, Jianguo ;

Li, Jinye .

SENSORS, 2024, 24 (05)

[44] Roles of temperature, materials, and domain inversion in high-performance, low-bias-drift thin film lithium niobate blue light modulators [J].

Celik, Oguz Tolga ;

Ammar, Nancy Yousry ;

Park, Taewon ;

Stokowski, Hubert S. ;

Multani, Kevin K. S. ;

Hwang, Alexander Y. ;

Gyger, Samuel ;

Guo, Yudan ;

Fejer, Martin M. ;

Safavi-Naeini, Amir H. .

OPTICS EXPRESS, 2024, 32 (21) :36160-36170

[45] Visible-light optical phased array on a thin-film lithium niobate platform for high-speed beam steering [J].

Ye, Yongqi ;

Lian, Daixin ;

Chen, Zhansheng ;

Dong, Yantao ;

Bai, Gang ;

Li, Bei ;

Song, Yiwei ;

Zhao, Shi ;

Wu, Jiachen ;

Chen, Jingye ;

Dai, Daoxin ;

Shi, Yaocheng .

OPTICS LETTERS, 2025, 50 (09) :3090-3093

[46] Mode-folded thin-film lithium niobate phase shifter for channel scalable optical interconnect with high switching efficiency [J].

Wang, Xinyi ;

Du, Jiangbing ;

Liu, Jiacheng ;

Xu, Ke ;

He, Zuyuan .

OPTICS EXPRESS, 2024, 32 (16) :28622-28632

[47] Digitally tunable optical delay line based on thin-film lithium niobate featuring high switching speed and low optical loss [J].

Ke, Wei ;

Lin, Yanmei ;

He, Mingbo ;

Xu, Mengyue ;

Zhang, Jiaxiang ;

Lin, Zhongjin ;

Yu, Siyuan ;

Cai, Xinlun .

PHOTONICS RESEARCH, 2022, 10 (11) :2575-2583

[48] High-Q miniaturized bound state in the continuum microcavities on thin-film lithium niobate towards efficient spatial light modulation [J].

Hu, Yuefeng ;

He, Huilin ;

Zhang, Zixuan ;

Liu, Zhen ;

Chen, Ye ;

Wang, Feifan ;

Yin, Xuefan ;

Peng, Chao .

OPTICS EXPRESS, 2025, 33 (05) :9317-9327

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