High-Performance Thin-Film Lithium Niobate Mach-Zehnder Modulator on 8-Inch Silicon Substrate

被引：0
作者：
Zhou, Jingjie [1 ]
Cong, Qingyu [1 ]
Lv, Liming [2 ]
Yao, Zhanshi [3 ]
Zhu, Shiyang [3 ]
Wang, Yuxi [3 ]
Li, Zhaoyi [1 ]
Fan, Zuowen [1 ]
Zeng, Xianfeng [4 ]
Hu, Ting [1 ]
Jia, Lianxi [1 ,2 ,4 ]
机构：
[1] Shanghai Univ, Sch Microelect, Shanghai, Peoples R China
[2] Shanghai Ind Technol Res Inst, Shanghai, Peoples R China
[3] Huawei Technol, B&P Lab, Shenzhen, Peoples R China
[4] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China
来源：
2024 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION, OFC | 2024年
关键词：
PHOTONICS; BREAKING; PLATFORM;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We first report the thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulator (MZM) on an 8-inch silicon substrate fabricated in the back-end-of-line (BEOL) of CMOS foundry. It operates at 1550 nm with electro-optical response of only 1.5 dB roll-off at 67 GHz. (c) 2024 The Author(s)
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页数：3
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