Premelted-Substrate-Promoted Selective Etching Strategy Realizing CVD Growth of High-Quality Graphene on Dielectric Substrates

被引:0
|
作者
Yang, Yuyao [1 ,2 ]
Yuan, Hao [1 ,2 ]
Liu, Mengxiong [1 ,2 ]
Cheng, Shuting [2 ,3 ]
Li, Wenjuan [1 ,2 ]
Liang, Fushun [1 ,2 ]
Zheng, Kangyi [2 ,4 ]
Liu, Longfei [2 ,5 ]
Yang, Fan [1 ,2 ]
Liu, Ruojuan [1 ,2 ]
Su, Qingxu [1 ,2 ]
Qi, Yue [2 ]
Liu, Zhongfan [1 ,2 ]
机构
[1] Peking Univ, Coll Chem & Mol Engn, Ctr Nanochem, Beijing Sci & Engn Ctr Nanocarbons,Beijing Natl La, Beijing 100871, Peoples R China
[2] Beijing Graphene Inst, Technol Innovat Ctr Graphene Metrol & Standardizat, Beijing 100095, Peoples R China
[3] China Univ Petr, Coll Sci, State Key Lab Heavy Oil Proc, Beijing 102249, Peoples R China
[4] Soochow Univ, Soochow Inst Energy & Mat Innovat, Coll Energy, Jiangsu Prov Key Lab Adv Carbon Mat & Wearable Ene, Suzhou 215006, Peoples R China
[5] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
基金
中国国家自然科学基金;
关键词
graphene; premelted substrate; selective etching; dielectric substrate; high quality; CHEMICAL-VAPOR-DEPOSITION; SINGLE-CRYSTAL GRAPHENE; RAPID GROWTH; FILMS; GLASS; LAYERS; METAL;
D O I
10.1021/acsami.4c20313
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Direct chemical vapor deposition growth of high-quality graphene on dielectric substrates is a great challenge. Graphene growth on dielectrics always suffers from the issues of a high nucleation density and poor quality. Herein, a premelted-substrate-promoted selective etching (PSE) strategy was proposed. The premelted substrate can promote charge transfer from the substrate to the nuclei near graphene domains, thus facilitating the reaction between the CO2 etchant and the nuclei. Consequently, the PSE strategy can realize selective etching of nuclei formed near graphene domains to evolve high-quality graphene with a uniform domain size of similar to 1 mu m and an I D/I G ratio of similar to 0.13 on glass fiber, achieving the largest domain size and the lowest defect density in graphene grown on a noncatalytic substrate without metal assistance. The largely improved quality of graphene significantly increases the electrical conductivity by 3 times and improves the working life by 7 times when applied as an electric heater compared with that fabricated without the PSE strategy.
引用
收藏
页码:6825 / 6834
页数:10
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