Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy

被引：0
作者：
Kaestner, Philipp [1 ,2 ]
Elsaka, Basma [1 ,2 ]
Iskhandar, Mustaqim Siddi Que [3 ]
Liebermann, Steffen [1 ,2 ,3 ]
Donatiello, Roland [1 ,2 ]
Liu, Shujie [1 ,2 ]
Hillmer, Hartmut [1 ,2 ]
机构：
[1] Univ Kassel, Inst Nanostruct Technol & Analyt INA, Technol Elect Dept, Heinrich Plett Str 40, D-34132 Kassel, Germany
[2] Univ Kassel, Ctr Interdisciplinary Nanostruct Sci & Technol CIN, Heinrich Plett Str 40, D-34132 Kassel, Germany
[3] Nanoscale Glasstec GmbH, Heinrich Plett Str 40, D-34132 Kassel, Germany
来源：
MICROMACHINES | 2025年 / 16卷 / 02期
关键词：
optical MEMS; micro-iris; interference microscopy; actuation voltage; response dynamics; transmission; circular shape; curvature; radial and angular homogeneity;
D O I：
10.3390/mi16020168
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
We present a MEMS array-based approach for micro-irises called "ring shutter", utilizing subfield addressing for applications in advanced micro-optics, such as interference microscopy. This experimental study is focused on investigating the homogeneity of electro-mechanical and optical characteristics within and between subfields of a lab demonstrator device. The characterization aims to ensure crosstalk-free and swift optical performance, as demonstrated in a previous study. For this purpose, the transmission in the initial state, actuation voltages, and response dynamics are measured for each electrode and the entire device, and the results are thoroughly compared. The measurements are conducted by expanding an existing optical actuation setup via tailored 3D-printed apertures, to isolate selected rings and zones. Evaluation of measurement data confirms the stable and crosstalk-free operation of the ring shutter. Both angular and radial homogeneity are robust and follow the expectations in the experiment. While transmission, actuation voltage and closing time slightly rise (up to 25%) with increased radial position represented by five discrete ring sections, the characteristics for different angular zones remain nearly constant. Response times are measured below 40 mu s, actuation voltages do not exceed 60 V, and the overall transmission of the ring shutter yields 53.6%.
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页数：12
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