Creating Single-Crystalline β-CaSiO3 for High-Performance Dielectric Packaging Substrate

被引:0
|
作者
Jia, Qingchao [1 ]
Wang, Wenzhi [1 ]
Zhang, Hujun [1 ]
Chen, Chunyu [1 ]
Li, Ao [1 ]
Chen, Chen [2 ]
Yu, Hang [2 ]
Zhang, Liangzhu [1 ]
Tao, Haizheng [3 ]
Zeng, Huidan [1 ]
Luo, Xiongke [2 ]
Yue, Yuanzheng [4 ]
机构
[1] East China Univ Sci & Technol, Sch Mat Sci & Engn, Shanghai 200237, Peoples R China
[2] Shanghai Zenfocus Semicond Technol Co Ltd, Shanghai 201206, Peoples R China
[3] Wuhan Univ Technol, State Key Lab Silicate Mat Architectures, Wuhan 430070, Peoples R China
[4] Aalborg Univ, Dept Chem & Biosci, DK-9220 Aalborg, Denmark
基金
中国国家自然科学基金;
关键词
glass ceramics; high flexural strength; low dielectric; LTCC substrates; single crystals; INTERMEDIATE-RANGE ORDER; GRAIN-GROWTH; GLASSES;
D O I
10.1002/adma.202414156
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
beta-CaSiO3 based glass-ceramics are among the most reliable materials for electronic packaging. However, developing a CaSiO3 glass-ceramic substrate with both high strength (>230 MPa) and low dielectric constant (<5) remains challenging due to its polycrystalline nature. The present work has succeeded in synthesizing single-crystalline beta-CaSiO3 for a high-performance glass-ceramic substrate. This is accomplished by introducing Al3+ into the CaO-B2O3-SiO2 glass system, and by optimizing the sintering condition. Al3+ doping facilitates a heterogeneous network structure that energetically favors the precipitation of polycrystalline particles, including nanosized beta-CaSiO3 crystals and sub-nanosized alpha-CaSiO3 crystals. As the sintering temperature increases, the nano alpha-CaSiO3 crystals (2-10 nm) are gradually absorbed by the beta-CaSiO3 crystals. Through atomic rearrangement, alpha-CaSiO3 crystals transform into micrometer-sized single crystal beta-CaSiO3 (1-2 <mu>m) with layered structure. The low temperature co-fired beta-CaSiO3 glass-ceramics exhibit exceptional properties, including a low dielectric constant of 4.04, a low dielectric loss of 3.15 x 10(-3) at 15 GHz, and a high flexural strength of 256 MPa. This work provides a new strategy for fabricating high-performance single-crystalline glass-ceramics for electronic packaging and other applications.
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页数:9
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