Radiation resistance and defect evolution in bulk β-Ga2O3: a molecular dynamics study

被引:0
作者
Zuo, Yijing [1 ]
Liu, Taiqiao [1 ]
Feng, Jiaren [1 ]
Zhao, Junlei [2 ]
Zhou, Zhixuan [1 ]
Cao, Ruyue [3 ]
Huang, Xiaona [4 ]
Yue, Yanan [4 ]
Huang, Sen [5 ]
Guo, Yuzheng [4 ]
Liu, Sheng [1 ,4 ]
Zhang, Zhaofu [1 ,6 ,7 ]
机构
[1] Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China
[2] Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
[4] Wuhan Univ, Sch Power & Mech Engn, Wuhan 430072, Peoples R China
[5] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[6] Wuhan Univ, Suzhou Inst, Suzhou 215123, Jiangsu, Peoples R China
[7] Wuhan Univ, Hubei Key Lab Elect Mfg & Packaging Integrat, Wuhan 430072, Peoples R China
基金
中国国家自然科学基金;
关键词
beta-Ga2O3; radiation resistance; defect evolution; molecular dynamics; Frenkel pairs; DAMAGE; MIGRATION; CLUSTERS;
D O I
10.1088/1361-6463/adbbfe
中图分类号
O59 [应用物理学];
学科分类号
摘要
Benefitting from its wide bandgap and robust ionic bonding nature, beta-Ga2O3 is a critical material in extreme radiation environments. To investigate its radiation-resistant properties and microstructure evolution, molecular dynamics simulation is employed to systematically study the impact of different primary knock-on atom (PKA) energies (1.5, 3.0, 5.0 and 7.0 keV) and different temperatures (173, 300 and 800 K) on radiation-induced defects along [010] direction in bulk beta-Ga2O3 crystals. The result shows that the Frenkel pairs (FPs) yield increases linearly with PKA energy. The threshold displacement energy of Ga and O were calculated. Although the increase in temperature slightly improves the defect recombination rate, it also leads to more defects during the radiation cascade collisions. This occurs because the elevated temperature influences the movement of displaced atoms, creating more branch-like small sub-cascades. These branches cause greater local energy deposition, forming damage regions and resulting in more defects after irradiation. Additionally, when the energy exceeds 1.5 keV, sub-cascade clusters begin to split, indicating an energy-temperature coupling mechanism. This study is crucial for enhancing the displacement damage resistance of beta-Ga2O3-based devices and provides a foundation for subsequent testing and analytical results of beta-Ga2O3 and related materials.
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页数:8
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