Tunable TiZrMoC Coatings: A Comprehensive Study of Microstructure, Mechanical Properties, and Wear Resistance

被引:3
作者
Pogrebnjak, Alexander [1 ,2 ]
Buranych, Volodymyr [2 ]
Ivashchenko, Volodymyr [3 ]
Borba-Pogrebnjak, Svitlana [1 ]
Maksakova, Olga [2 ]
Caplovicova, Maria [4 ]
Goncharov, Alexander [1 ,2 ]
Onoprienko, Alexei [3 ]
Skrynskyy, Petro [3 ]
Sahul, Martin [2 ]
Konarski, Piotr [5 ]
Budzynski, Piotr [6 ]
Kaminski, Mariusz [6 ]
Opielak, Marek [7 ]
Flock, Dominik [8 ]
Pelenovich, Vasiliy [9 ,10 ]
Bing, Yang [11 ]
机构
[1] Sumy State Univ, Dept Tech Thermophys, 116 Kharkivska St, UA-40007 Sumy, Ukraine
[2] Slovak Univ Technol, Inst Mat Sci, Fac Mat Sci & Technol, J Bottu 25, Trnava 91724, Slovakia
[3] NAS Ukraine, Frantsevich Inst Problems Mat Sci, Krzhyzhanovsky 3, UA-03142 Kyiv, Ukraine
[4] Slovak Univ Technol Bratislava, Ctr Nanodiag Mat, Vazovova 5, Bratislava 81243, Slovakia
[5] Lukasiewicz Res Network Tele & Radio Res Inst, 11 Ratuszowa St, PL-03450 Warsaw, Poland
[6] Lublin Univ Technol, Fac Mech Engn, Nadbystrzycka Str 36, PL-20618 Lublin, Poland
[7] WSEI Univ, Dept Transportat & Informat, 4 Projektowa Str, PL-20209 Lublin, Poland
[8] Ilmenau Univ Technol, Inst Mat Sci & Engn, Gustav-Kirchhoff Str 1, D-98693 Ilmenau, Germany
[9] Wuhan Univ, Hubei Key Lab Elect Mfg & Packaging Integrat, Wuhan 430072, Peoples R China
[10] Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China
[11] Wuhan Univ, Sch Power & Mech Engn, Wuhan 430072, Peoples R China
关键词
TiZrMoC coatings; dual DC magnetron sputtering; X-ray photoelectron spectroscopy; computational modeling; nanostructure; TITANIUM-ALLOYS; SOLID-SOLUTIONS; TI-MO; FILMS; CARBIDE; MOLYBDENUM; ENERGY; ELECTROCATALYSTS; SPECTROSCOPY; DEPOSITION;
D O I
10.3390/nano14241986
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
TiZrMoC coatings were deposited on Si(100) substrates using a DC dual magnetron sputtering. The composition was controlled by adjusting the sputtering parameters of the TiZrMo and graphite targets. The influence of graphite target current on the resulting coating properties was explored. TEM analysis revealed a single-phase structure with Ti/Mo/Zr substitutional elements, columnar grains, and a strong [111] texture. Nanotwins and stacking faults were prevalent within the nanocrystals. EDX, SIMS, XRD, and XPS analyses confirmed the elemental composition and nanostructure. Computational modeling was employed to investigate the mixing behavior of the quaternary solid solutions depending on the valency electron concentration. The films exhibited exceptional mechanical properties, including a maximum hardness of 35 GPa and a wear rate of 2.11 x 10-7 mm3N-1m-1, attributed to the presence of an amorphous carbon layer and optimized deposition parameters. These findings demonstrate the potential of TiZrMoC coatings for advanced applications requiring exceptional wear resistance and durability.
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页数:23
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