Rapid Octadecylphosphonic Acid Self-Assembled Monolayer Formation on Cu for Etch Inhibition: Characterizations Using Sum Frequency Generation Vibrational Spectroscopy

被引:0
作者
Johnson, Trace [1 ,2 ]
Mawela, Jayani [1 ]
Wu, Yuchen [1 ,2 ]
Guevenc, Haci Osman [3 ]
Klipp, Andreas [3 ]
Gupta, Rohini [4 ]
Hirth, Sabine [3 ]
Chen, Zhan [1 ,2 ]
机构
[1] Univ Michigan, Dept Chem, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Macromol Sci & Engn, Ann Arbor, MI 48109 USA
[3] BASF SE, D-67056 Ludwigshafen, Germany
[4] BASF Innovat Campus Mumbai, Navi Mumbai 400705, Maharashtra, India
关键词
ALKANETHIOL MONOLAYERS; MOLECULAR-ORIENTATION; CHEMICAL-STRUCTURE; N-ALKANETHIOL; IN-SITU; SURFACE; COPPER; INTERFACES; ADHESION; GOLD;
D O I
10.1021/acs.langmuir.4c05097
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Self-assembled monolayers (SAMs) can be used to modify surface properties in a large area, which have wide applications ranging from corrosion inhibition, electronic device fabrication, oil/water separation, to biosensors. In industry, it is required to deposit a monolayer on copper substrate for etch inhibition within a short period of time. This study developed a simple method to satisfy such a need in industry. The SAM was deposited by using octadecylphosphonic acid (ODPA) solution. The quality of the prepared ODPA SAM on copper was compared to that of the SAM prepared using octadecanethiol (ODT) on copper. Sum frequency generation (SFG) vibrational spectroscopy was applied to characterize the deposited SAMs. It was found that ODPA SAMs prepared with 2 min of deposition time using ODPA solutions with concentrations of 0.05%, 0.1%, and 0.2% only have small numbers of gauche defects, with 80% or more methyl surface coverages compared to ODT SAMs. The deduced methyl group orientations of such ODPA SAMs are similar to that of the ODT SAM methyl groups. This study successfully demonstrated the feasibility of preparing relatively good quality ODPA SAMs on copper using a short deposition time.
引用
收藏
页码:5467 / 5476
页数:10
相关论文
共 66 条
  • [1] Love J.C., Estroff L.A., Kriebel J.K., Nuzzo R.G., Whitesides G.M., Self-Assembled Monolayers of Thiolates on Metals as a Form of Nanotechnology, Chem. Rev., 105, 4, pp. 1103-1170, (2005)
  • [2] Zhao W., Gothelid M., Hosseinpour S., Johansson M.B., Li G., Leygraf C., Johnson C.M., The Nature of Self-Assembled Octadecylphosphonic Acid (ODPA) Layers on Copper Substrates, J. Colloid Interface Sci., 581, pp. 816-825, (2021)
  • [3] Kanta A., Sedev R., Ralston J., The Formation and Stability of Self-Assembled Monolayers of Octadecylphosphonic Acid on Titania, Colloids Surf. Physicochem. Eng. Asp., 291, 1-3, pp. 51-58, (2006)
  • [4] Schmaltz T., Sforazzini G., Reichert T., Frauenrath H., Self-Assembled Monolayers as Patterning Tool for Organic Electronic Devices, Adv. Mater., 29, 18, (2017)
  • [5] Fonder G., Minet I., Volcke C., Devillers S., Delhalle J., Mekhalif Z., Anchoring of Alkylphosphonic Derivatives Molecules on Copper Oxide Surfaces, Appl. Surf. Sci., 257, 14, pp. 6300-6307, (2011)
  • [6] Hu C.-K., Harper J.M.E., Copper Interconnections and Reliability, Mater. Chem. Phys., 52, 1, pp. 5-16, (1998)
  • [7] Bobb-Semple D., Nardi K.L., Draeger N., Hausmann D.M., Bent S.F., Area-Selective Atomic Layer Deposition Assisted by Self-Assembled Monolayers: A Comparison of Cu, Co, W, and Ru, Chem. Mater., 31, 5, pp. 1635-1645, (2019)
  • [8] Prasittichai C., Pickrahn K.L., Minaye Hashemi F.S., Bergsman D.S., Bent S.F., Improving Area-Selective Molecular Layer Deposition by Selective SAM Removal, ACS Appl. Mater. Interfaces, 6, 20, pp. 17831-17836, (2014)
  • [9] Bobb-Semple D., Zeng L., Cordova I., Bergsman D.S., Nordlund D., Bent S.F., Substrate-Dependent Study of Chain Orientation and Order in Alkylphosphonic Acid Self-Assembled Monolayers for ALD Blocking, Langmuir, 36, 43, pp. 12849-12857, (2020)
  • [10] Khassanov A., Steinruck H.-G., Schmaltz T., Magerl A., Halik M., Structural Investigations of Self-Assembled Monolayers for Organic Electronics: Results from X-Ray Reflectivity, Acc. Chem. Res., 48, 7, pp. 1901-1908, (2015)