Dependence of RF Sputtering Power on Structural and Electrical Properties of SnO2 Thin Films

被引：1

作者：

Sajdeh, Natasha ^{[1
]}

Terohid, Seyed Ali Asghar ^{[1
]}

Asgary, Somayeh ^{[2
]}

Pour, Ghobad Behzadi ^{[3
]}

机构：

[1] Islamic Azad Univ, Dept Phys, Hamedan Branch, Hamadan, Iran

[2] Islamic Azad Univ, Dept Phys, West Tehran Branch, Tehran, Iran

[3] Islamic Azad Univ, Dept Phys, East Tehran Branch, Tehran, Iran

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 2025年

关键词：

magnetron sputtering; radio frequency power; thin film; tin (IV) oxide; TIN OXIDE-FILMS; OPTICAL-PROPERTIES; RAMAN-SCATTERING; TEMPERATURE; DEPOSITION; NANOPARTICLES; EVAPORATION; NANOBELTS; SILICON; SIZE;

D O I：

10.1002/jemt.24759

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

SnO2 thin films were deposited on Si substrates by radio frequency (RF) magnetron sputtering technique, and the effects of different sputtering power (60-90 W) on the structural, surface morphological, and electrical properties of the film were investigated with XRD, Raman, AFM, SEM, and fore point probe. The deposited SnO2 film at lower RF was amorphous, while well-defined intense XRD signals at higher RF power indicated significant improvement in crystalline nature. Eg and A1g vibrating modes related to SnO2 were clearly observed in the Raman spectra. With the increasing RF sputtering power, the surface roughness of the films gradually increased while electrical resistivity revealed sharp decrease.

引用

页数：8

共 53 条

[1] Band gap narrowing and fluorescence properties of nickel doped SnO2 nanoparticles
Ahmed, Arham S.
Muhamed, Shafeeq M.
Singla, M. L.
Tabassum, Sartaj
Naqvi, Alim H.
Azam, Ameer
[J]. JOURNAL OF LUMINESCENCE, 2011, 131 (01) : 1 - 6
[2] PROPERTIES OF TIN OXIDE-FILMS PREPARED BY REACTIVE ELECTRON-BEAM EVAPORATION
BANERJEE, R
DAS, D
[J]. THIN SOLID FILMS, 1987, 149 (03) : 291 - 301
[3] Electron transport and defect structure in highly conducting reactively sputtered ultrathin tin oxide films
Bansal, Shikha
Pandya, Dinesh K.
Kashyap, Subhash C.
[J]. APPLIED PHYSICS LETTERS, 2014, 104 (08)
[4] Charge transport mechanism in high conductivity undoped tin oxide thin films deposited by reactive sputtering
Bansal, Shikha
Pandya, Dinesh K.
Kashyap, Subhash C.
[J]. THIN SOLID FILMS, 2012, 524 : 30 - 34
[5] A novel approach for the synthesis of SnO2 nanoparticles and its application as a catalyst in the reduction and photodegradation of organic compounds
Bhattacharjee, Archita
Ahmaruzzaman, M.
Sinha, Tanur
[J]. SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 2015, 136 : 751 - 760
[6] Electrical properties and topography of SnO2 thin films prepared by reactive sputtering
Brousseau, JL
Bourque, H
Tessier, A
Leblanc, RM
[J]. APPLIED SURFACE SCIENCE, 1997, 108 (03) : 351 - 358
[7] A STUDY OF UNDOPED AND MOLYBDENUM DOPED, POLYCRYSTALLINE, TIN OXIDE THIN-FILMS PRODUCED BY A SIMPLE REACTIVE EVAPORATION TECHNIQUE
CASEY, V
STEPHENSON, MI
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (09) : 1212 - 1215
[8] Influence of annealing on the physical properties of filtered vacuum arc deposited tin oxide thin films
Cetinoergue, E.
Goldsmith, S.
Rosenberg, Yu
Boxman, R. L.
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2007, 353 (26) : 2595 - 2602
[9] Effects of RF Power on Electrical and Structural Properties of Sputtered SnO2:Sb Thin Films
Cevher, O.
Guler, M. O.
Tocoglu, U.
Cetinkaya, T.
Akbulut, H.
Okumus, S. C.
[J]. ACTA PHYSICA POLONICA A, 2014, 125 (02) : 293 - 295
[10] SnO2 thin films grown by pulsed Nd:YAG laser deposition
Chan y Diaz, E.
Duarte-Moller, A.
Camacho, Juan M.
Castro-Rodriguez, R.
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2012, 106 (03): : 619 - 624

← 1 2 3 4 5 6 →