Mechanically strong, transparent polyimide composite thin films with a low dielectric constant

被引:8
作者
Bai, He [1 ]
Hu, Yunting [1 ]
Zhao, Yongliang [2 ]
Zhu, Xiaomin [3 ]
Hu, Jianhua [1 ]
Wang, Haitao [1 ]
机构
[1] Fudan Univ, Dept Macromol Sci, State Key Lab Mol Engn Polymers, Shanghai 200438, Peoples R China
[2] Shanghai Dilato Mat Co Ltd, Shanghai 200433, Peoples R China
[3] Zhejiang Sci Tech Univ, Int Inst Silk, Sch Text Sci & Engn, Hangzhou 310018, Peoples R China
关键词
Poly(amic acid) salt; Composite films; Silica hollow nanospheres; Low; k materials; NANOCOMPOSITES; MICROSTRUCTURE; PERFORMANCE; AEROGELS;
D O I
10.1016/j.coco.2024.102129
中图分类号
TB33 [复合材料];
学科分类号
摘要
Aromatic polyimide is widely used in microelectronics as dielectric packaging layers. There is a high demand to reduce its dielectric constant to meet the fast development of communication technology. Here we report a simple and eco-friendly approach to preparing polyimide films with a lowered dielectric constant by adding silica hollow nanospheres with an average size of 100 nm in an aqueous solution of poly(amic acid) salt, and subsequent film casting and thermal imidization. The silica hollow nanospheres present a uniform distribution in polyimide matrix after surface modification with 3-aminopropyltriethoxysilane. The dielectric constant of the resulting composite films decreases linearly with particle loading till 15 wt% and reaches the lowest value of 2.5. The surface hardness and elastic modulus of the films improve by adding hollow nanospheres, while maintaining high optical transparency, high flexibility and a low coefficient of thermal expansion.
引用
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页数:8
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共 55 条
[1]   Highly Transparent, Colorless Optical Film with Outstanding Mechanical Strength and Folding Reliability Using Mismatched Charge-Transfer Complex Intensification [J].
Ahn, Chanjae ;
Kim, Tae Yong ;
Hong, Pyong Hwa ;
Choi, Sungwon ;
Lee, Yea-Jin ;
Kwon, Hanui ;
Jeon, Hyeryeon ;
Ko, Dong Won ;
Park, In ;
Han, Haksoo ;
Hong, Sung Woo .
ADVANCED FUNCTIONAL MATERIALS, 2022, 32 (20)
[2]   Flexible and quasi-isotropically thermoconductive polyimide films by guided assembly of boron nitride nanoplate/boron nitride flakes for microelectronic application [J].
An, Lulu ;
Yang, Zenghui ;
Zeng, Xiaoliang ;
Hu, Wanbiao ;
Zhang, Junyan ;
Wang, Qihua ;
Yu, Yuanlie .
CHEMICAL ENGINEERING JOURNAL, 2022, 431
[3]   Nanoindentation and wear properties of Ti and Ti-TiB composite materials produced by selective laser melting [J].
Attar, H. ;
Ehtemam-Haghighi, S. ;
Kent, D. ;
Okulov, I. V. ;
Wendrock, H. ;
Boenisch, M. ;
Volegov, A. S. ;
Calin, M. ;
Eckert, J. ;
Dargusch, M. S. .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2017, 688 :20-26
[4]   Influence of biobased silica/carbon hybrid nanoparticles on thermal and mechanical properties of biodegradable polymer films [J].
Biswas, Manik C. ;
Jeelani, Shaik ;
Rangari, Vijaya .
COMPOSITES COMMUNICATIONS, 2017, 4 :43-53
[5]   Preparation and characterization of low gloss UV-curable coatings based on silica surface modification using an acrylate monomer [J].
Calvez, Ingrid ;
Szczepanski, Caroline R. ;
Landry, Veronic .
PROGRESS IN ORGANIC COATINGS, 2021, 158
[6]   Low Dielectric Constant Polyimide Hybrid Films Prepared by in Situ Blow-Balloon Method [J].
Chen, Zhao ;
Zhu, Dandan ;
Tong, Faqin ;
Lu, Xuemin ;
Lu, Qinghua .
ACS APPLIED POLYMER MATERIALS, 2019, 1 (08) :2189-2196
[7]   High speed 4D printing of shape memory polymers with nanosilica [J].
Choong, Yu Ying Clarrisa ;
Maleksaeedi, Saeed ;
Eng, Hengky ;
Yu, Suzhu ;
Wei, Jun ;
Su, Pei-Chen .
APPLIED MATERIALS TODAY, 2020, 18
[8]   Hollow Silica Nanoparticles in UV-Visible Antireflection Coatings for Poly(methyl methacrylate) Substrates [J].
Du, Yi ;
Luna, Lunet E. ;
Tan, Wui Siew ;
Rubner, Michael F. ;
Cohen, Robert E. .
ACS NANO, 2010, 4 (07) :4308-4316
[9]   All-carbocycle hydrocarbon thermosets with high thermal stability and robust mechanical strength for low-k interlayer dielectrics [J].
Feng, Yudi ;
Jin, Ke ;
Guo, Jia ;
Wang, Changchun .
POLYMER CHEMISTRY, 2021, 12 (33) :4812-4821
[10]   Templated silica tubes with high aspect ratios as effective fillers for enhancing the overall performance of polyimide films [J].
Fu, Shao-Yun ;
Zheng, Bin .
CHEMISTRY OF MATERIALS, 2008, 20 (03) :1090-1098