TWO STAGE HALL TYPE SOURCE: DISCHARGE CHARACTERISTICS AND ELECTRON ENERGY DISTRIBUTION FUNCTION

被引：0
|
作者：
Bazhenov, V. Yu. [1 ]
Dobrovolskii, A. M. [1 ]
Tsiolko, V. V. [1 ]
Piun, V. M. [1 ]
机构：
[1] NAS Ukraine, Inst Phys, Kyiv, Ukraine
来源：
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2024年 / 06期
关键词：
IMPACT EXCITATION; CROSS-SECTIONS; ARGON;
D O I：
10.46813/2024-154-072
中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
The influence of working gas pressure and potentials of the cathodes of the two-stage plasma source with an anode layer on the dynamic current-voltage and power-voltage characteristics of separate stages of the discharge has been established. The effect of the source operating modes on the EEDF was determined by the method of emission optical diagnostics. In particular, the existence of a group of electrons with energy of approximate to 35...50 eV was found in the axial zone of the plasma source.
引用
收藏
页码：72 / 77
页数：6
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