High Q-factor and single mode integrated optic racetrack ring resonator for the sensing applicationsHigh Q-factor and single mode...V. Kolli et al.

被引：0

作者：

Venkateswara Rao Kolli ^{[1
]}

Indira Bahaddur ^{[1
]}

Srinivas Talabattula ^{[2
]}

机构：

[1] Malnad College of Engineering,Electronics and Communication Engineering

[2] Indian Institute of Science,Electrical Communication Engineering

来源：

Optical and Quantum Electronics | / 57卷 / 4期

关键词：

Micro racetrack ring resonator; Force sensor; Finite difference time domain; Finite element method; Micro cantilever beam; High Q factor; Free spectral range; Sensitivity; Low force;

D O I：

10.1007/s11082-025-08146-8

中图分类号：

学科分类号：

摘要：

This work describes, an integrated optic racetrack ring resonator (RRR) for various sensing applications, especially force sensing applications. Initially, two different configurations of RRR are optimized using the Finite-Difference-Time Domain (FDTD) method to obtain high sensitivity, a large FSR, high Q factor, and high intensity. The optimized dimensions of two RRRs are considered as radius is 5 μm, the racetrack ring waveguide width is 500 nm, input–output port width is 450 nm and thickness is 220 nm. These improved RRRs are used in the design of two distinct force sensors. The photo-elastic effect principle is adhered by the sensor. There are two stages to the force sensor analysis. The Finite Element Method is used for the stress analysis, and field propagation analysis of sensing element RRR is carried out by FDTD. This sensor provides a high sensitivity of 80 pm and 120 pm for two force sensors, respectively. The sensor provides Q-factor of 8153 and 15,490 at the coupling gap of 150 nm and 200 nm respectively obtained for the force range of 0–1 μN.

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