Prototype of Flexible Digital X-Ray Imaging Detector

被引：0

作者：

Kwon, Seyeoul ^{[1
]}

Andrew Parker, Charles ^{[1
]}

Paetow, Kristofer ^{[1
]}

Reed, Hunter ^{[1
]}

Chahid, Sara ^{[1
]}

Jo Han, Geun ^{[1
]}

Widjaja, Agus ^{[1
]}

Cho, Jinhui ^{[1
]}

Cadena, Kevin ^{[1
]}

Granaas, Kevin ^{[1
]}

Crocco, Jerome ^{[1
]}

机构：

[1] InnovaFlex Foundry, Colorado Springs, CO 80916 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2024年 / 45卷 / 12期

关键词：

Substrates; Detectors; X-ray imaging; Glass; Photodiodes; Films; Thin film transistors; Scintillators; X-ray detectors; Reliability; Flexible substrate; thin-film transistor; digital X-ray detector;

D O I：

10.1109/LED.2024.3478777

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter presents the development of a flexible digital X-ray imaging detector based on flat panel display manufacturing principles. The detector array was fabricated using amorphous silicon thin-film transistors (a-Si TFTs) on flexible polyimide (PI) substrate. The TFT characteristics of the flexible detector array show comparable performance to the glass substrate detector array. The field effect mobility (mu) of a-Si TFT on flexible substrate was 0.66 cm(2)/V & sdot; s, the thresholder voltage (V-T) was 4.21 V, the subthreshold slops (SS) was 0.42 V/decade, and the off-current (I-OFF) was about 6.5x10(-14) A. The X-ray image was 161 mm x 215 mm in size. The environmental reliability of the flexible detector were tested using thermal and conditions of 65 degrees C at a relative humidity (RH) of 70%. Furthermore, temperature cycling between -20 degrees C/+60 degrees C was used to test the flexible detectors and which also shown acceptable passing results for commercialization. The preliminary studying results demonstrate the feasibility of a flexible X-ray imaging detector, which could have significant implications for the medical imaging industry.

引用

页码：2439 / 2442

页数：4

共 8 条

[1] Laser lift-off systems for flexible-display production [J].