Performance enhancement of InSnZnO thin-film transistors by modifying the dielectric-semiconductor interface with colloidal quantum dots

被引:1
作者
Chen, Sijie [1 ]
Chen, Haoran [2 ]
Xia, Chenghui [2 ]
Sun, Zhenhua [1 ]
机构
[1] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov,State Key Lab Radio F, Shenzhen 518060, Peoples R China
[2] Ocean Univ China, Sch Mat Sci & Engn, Qingdao 266404, Shandong, Peoples R China
来源
NANOSCALE ADVANCES | 2025年 / 7卷 / 05期
关键词
ELECTRICAL PERFORMANCE; LAYER; PASSIVATION; DEPOSITION; STABILITY;
D O I
10.1039/d4na00967c
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Thin film transistors (TFTs) with InSnZnO (ITZO) and Al2O3 as the semiconductor and dielectric layers, respectively, were investigated, aiming to elevate the device performance. Chemically synthesized CuInS2/ZnS core/shell colloidal quantum dots (QDs) were used to passivate the semiconductor/dielectric interface. Compared with the pristine device, the device with the integrated QDs demonstrates remarkably improved electrical performance, including a higher electron mobility and a lower leakage current. Moreover, the integration of QDs largely mitigates hysteresis in the bidirectional transfer characteristics of the device. Improved negative bias stress stability is also observed in the device with QDs. The performance enhancement is ascribed to the reduction of the trap states induced by the defects in Al2O3, and the screening of electrical dipoles at the Al2O3/ITZO interface. This work proposes a new strategy to passivate the semiconductor/dielectric interface, which not only improves TFT performance, but also holds potential for optoelectronic applications.
引用
收藏
页码:1300 / 1304
页数:5
相关论文
共 41 条
[1]   Sputtered ZnO Thin-Film Transistors With Carrier Mobility Over 50 cm2/Vs [J].
Brox-Nilsen, Christian ;
Jin, Jidong ;
Luo, Yi ;
Bao, Peng ;
Song, Aimin M. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (10) :3424-3429
[2]   Significant performance and stability improvement of low-voltage InZnO thin-film transistors by slight La doping [J].
Cai, Wensi ;
Li, Mengchao ;
Li, Haiyun ;
Qian, Qingkai ;
Zang, Zhigang .
APPLIED PHYSICS LETTERS, 2022, 121 (06)
[3]   One-Volt, Solution-Processed InZnO Thin-Film Transistors [J].
Cai, Wensi ;
Li, Haiyun ;
Zang, Zhigang .
IEEE ELECTRON DEVICE LETTERS, 2021, 42 (04) :525-528
[4]   Advances in mobility enhancement of ITZO thin-film transistors: a review [J].
Chen, Feilian ;
Zhang, Meng ;
Wan, Yunhao ;
Xu, Xindi ;
Wong, Man ;
Kwok, Hoi-Sing .
JOURNAL OF SEMICONDUCTORS, 2023, 44 (09)
[5]   Rational selection of the oxygen source for atomic layer deposition Al2O3 insulators [J].
Chen, Xue ;
Wu, Ruokai ;
Wan, Jiaxian ;
Wu, Hongwei ;
Wu, Hao ;
Liu, Chang .
VACUUM, 2023, 215
[6]   Mechanism of Hysteresis for a-IGZO TFT Studied by Changing the Gate Voltage Waveform in Measurement [J].
Chen, Yi-Jung ;
Tai, Ya-Hsiang ;
Chang, Chun-Yi .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 63 (04) :1565-1571
[7]   SURFACE-CHEMISTRY OF AL2O3 DEPOSITION USING AL(CH3)(3) AND H2O IN A BINARY REACTION SEQUENCE [J].
DILLON, AC ;
OTT, AW ;
WAY, JD ;
GEORGE, SM .
SURFACE SCIENCE, 1995, 322 (1-3) :230-242
[8]   Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances [J].
Fortunato, E. ;
Barquinha, P. ;
Martins, R. .
ADVANCED MATERIALS, 2012, 24 (22) :2945-2986
[9]   Low-temperature Al2O3 atomic layer deposition [J].
Groner, MD ;
Fabreguette, FH ;
Elam, JW ;
George, SM .
CHEMISTRY OF MATERIALS, 2004, 16 (04) :639-645
[10]  
He G, 2007, J MATER SCI TECHNOL, V23, P433