Research on Interferometric Tilt Sensor for Vibration Isolation Platform

Low-frequency seismic vibrations extremely limit the performance of ground simulation facilities for space-borne gravitational wave detections, which need to be substantially suppressed. Active vibration systems are thus required. However, the tilt-translation coupling of inertial sensors strongly limits the performance of vibration isolation platforms in the low frequency range, which requires a precise measurement of the low-frequency tilt signal. This study compares two methods for the tilt signal measurement: the differential-mode method and the direct method. The differential-mode method estimates tilt signals by analyzing differential motion between two inertial sensors, while the direct method utilizes an interferometric tilt sensor (ITS) which consists of a suspended rotational beam system and an interferometer for the readout. Experimental results show that ITS achieves a lower noise floor. Its noise floor is dominated by the thermal-mechanical noise below 0.25 Hz and the readout noise of the interferometer above 0.25 Hz. The findings highlight the potential of ITS for improving the performance of vibration isolation platforms in the low-frequency range.