[1] Univ Duisburg Essen, Electroenerget Funct Mat EEFM, D-47057 Duisburg, Germany
[2] Univ Duisburg Essen, CENIDE, D-47057 Duisburg, Germany
[3] Univ Duisburg Essen, Werkstoffe Elektrotech WET, D-47057 Duisburg, Germany
[4] Rhein Westfal TH Aachen, Cpd Semicond Technol, D-52074 Aachen, Germany
[5] Univ Duisburg Essen, Nanoparticle Proc Technol NPPT, D-47057 Duisburg, Germany
[6] AIXTRON SE, D-52134 Herzogenrath, Germany