[1] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Sch Mat Sci & Engn, Key Lab Adv Mat, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Sch Integrated Circuits, Beijing 100084, Peoples R China