PMMA Microsphere-Based Fabry-Perot Fiber-Optic Humidity Sensor

被引:0
作者
He, Xiangming [1 ]
Gong, Huaping [1 ]
Li, Weichen [1 ]
Xu, Ben [1 ]
Zhao, Chunliu [1 ]
机构
[1] China Jiliang Univ, Coll Opt & Elect Technol, Hangzhou 310018, Zhejiang, Peoples R China
关键词
Sensors; Humidity; Sensitivity; Humidity measurement; Temperature measurement; Optical fiber sensors; Length measurement; Temperature sensors; Optical fibers; Size measurement; Fabry-Perot (F-P) interferometer; fiber-optic humidity sensor; polymethyl methacrylate (PMMA); MACH-ZEHNDER INTERFEROMETER; OPTICAL-FIBER;
D O I
10.1109/JSEN.2025.3525655
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Polymethyl methacrylate (PMMA) microsphere-based Fabry-Perot (F-P) fiber-optic humidity sensor is proposed. A hollow-core fiber (HCF) is spliced with a single-mode fiber (SMF), and a PMMA microsphere is inserted into the HCF. Three sensors with different PMMA microsphere sizes (110, 120, and 130 mu m) were fabricated by using PMMA microsphere as a moisture-sensitive material, and the moisture-sensing characteristics of these sensors with different cavity lengths (45, 60, 75, and 90 mu m) were measured in the range of relative humidity (RH) from 35%RH to 95%RH. The results show that the sensor with a PMMA microsphere size of 110 mu m and a cavity length of 45 mu m has the best sensitivity to humidity of 0.074 nm/%RH. Its repeatability, stability, response time, and temperature effect are also investigated. This is the first fiber-optic humidity sensor with an F-P structure using PMMA microsphere as filler instead of moisture-sensitive film or gel. Compared to moisture-sensitive film or gel that are prone to aging and hardening leading to a short service life and are prone to deliquescence under high humidity, the sensor proposed in this article has the advantages of wide measurement range that can be applied to high humidity measurement, fast response time, good long-term stability, and long service life
引用
收藏
页码:6396 / 6403
页数:8
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