A Review of Thin-Film Growth, Properties, Applications, and Future Prospects

被引:0
作者
Sakthinathan, Subramanian [1 ,2 ]
Meenakshi, Ganesh Abinaya [1 ,2 ]
Vinothini, Sivaramakrishnan [1 ,2 ]
Yu, Chung-Lun [1 ,2 ,3 ]
Chen, Ching-Lung [4 ,5 ,6 ]
Chiu, Te-Wei [1 ,2 ]
Vittayakorn, Naratip [7 ]
机构
[1] Natl Taipei Univ Technol, Dept Mat & Mineral Resources Engn, 1,Sect 3,Chung Hsiao East Rd, Taipei 10608, Taiwan
[2] Natl Taipei Univ Technol, Inst Mat Sci & Engn, 1,Sect 3,Chung Hsiao East Rd, Taipei 10608, Taiwan
[3] Natl Taipei Univ Technol, High Value Biomat Res & Commercializat Ctr, 1,Sect 3,Zhongxiao E Rd, Taipei 10608, Taiwan
[4] Ming Chi Univ Technol, Dept Safety Hlth & Environm Engn, New Taipei City 24301, Taiwan
[5] Ming Chi Univ Technol, Ctr Environm Sustainabil & Human Hlth, New Taipei City 24301, Taiwan
[6] Chang Gung Univ, Ctr Sustainabil & Energy Technol, Taoyuan 33302, Taiwan
[7] King Mongkuts Inst Technol Ladkrabang, Fac Sci, Adv Mat Res Unit, 1 Chalong Krung 1 Alley,Lat Krabang, Bangkok 10520, Thailand
关键词
thin-film technology; classification; deposition technique; thin-film sensors; parameters; CHEMICAL SOLUTION DEPOSITION; PHYSICAL VAPOR-DEPOSITION; DIRECT ELECTRON-TRANSFER; ATOMIC LAYER DEPOSITION; PULSED-LASER DEPOSITION; MESOPOROUS SILICA; OPTICAL-PROPERTIES; CRYSTALLINE ORIENTATION; DIRECT ELECTROCHEMISTRY; CARBON ELECTRODE;
D O I
10.3390/pr13020587
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
This review article's primary aim is to discuss different thin-film deposition technique methods and their important uses. The histories of thin-film technology, thin-film growth, thin-film classification, and thin-film preparation techniques are also covered in this review article. The preparation and characterization of functional thin films and nanostructured materials, as well as various devices based on these materials and recent developments are also focused on in this review. The properties of the materials and several thin-film deposition techniques are also covered in this article. This review article also discusses the classification and application of thin-film sensors. Furthermore, the formation of thin films and their physical properties are impacted by deposition conditions such as pH, temperature, deposition time, and deposition parameters, which are analyzed. This article discusses how a wide range of potential uses in structural, mechanical, and protective coatings; sensing; energy storage systems; catalysis; optoelectronics; and biomedicine are made possible by the special qualities of thin films and nanostructured materials, including their high surface area to volume ratio, structure, surface charge, anisotropic nature, and tunable functionalities.
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页数:41
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