Two-photon lithography for integrated photonic packaging
被引:12
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作者:
Yu, Shaoliang
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Zhejiang Lab, Hangzhou 311100, Peoples R ChinaZhejiang Lab, Hangzhou 311100, Peoples R China
Yu, Shaoliang
[1
]
Du, Qingyang
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Zhejiang Lab, Hangzhou 311100, Peoples R ChinaZhejiang Lab, Hangzhou 311100, Peoples R China
Du, Qingyang
[1
]
Mendonca, Cleber Renato
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机构:
MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
Univ Sao Paulo, Sao Carlos Inst Phys, BR-13560970 Sao Carlos, SP, BrazilZhejiang Lab, Hangzhou 311100, Peoples R China
Mendonca, Cleber Renato
[2
,3
]
Ranno, Luigi
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MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USAZhejiang Lab, Hangzhou 311100, Peoples R China
Ranno, Luigi
[2
]
Gu, Tian
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机构:
MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
MIT, Mat Res Lab, Cambridge, MA 02139 USAZhejiang Lab, Hangzhou 311100, Peoples R China
Gu, Tian
[2
,4
]
Hu, Juejun
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MIT, Mat Res Lab, Cambridge, MA 02139 USAZhejiang Lab, Hangzhou 311100, Peoples R China
Hu, Juejun
[4
]
机构:
[1] Zhejiang Lab, Hangzhou 311100, Peoples R China
[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[3] Univ Sao Paulo, Sao Carlos Inst Phys, BR-13560970 Sao Carlos, SP, Brazil
Photonic integrated circuits (PICs) have long been considered as disruptive platforms that revolutionize optics. Building on the mature industrial foundry infrastructure for electronic integrated circuit fabrication, the manufacturing of PICs has made remarkable progress. However, the packaging of PICs has often become a major barrier impeding their scalable deployment owing to their tight optical alignment tolerance, and hence, the requirement for specialty packaging instruments. Two-photon lithography (TPL), a laser direct-write three-dimensional (3-D) patterning technique with deep subwavelength resolution, has emerged as a promising solution for integrated photonics packaging. This study provides an overview of the technology, emphasizing the latest advances in TPL-enabled packaging schemes and their prospects for adoption in the mainstream photonic industry.
机构:
Korea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South KoreaKorea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South Korea
Lee, Jisun
Park, Seong Jun
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Korea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South KoreaKorea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South Korea
Park, Seong Jun
Han, Seung Chul
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Korea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South KoreaKorea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South Korea
Han, Seung Chul
Prabhakaran, Prem
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Hannam Univ, Dept Adv Mat & Chem Engn, Daejeon 34054, South KoreaKorea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South Korea
Prabhakaran, Prem
Ha, Cheol Woo
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Korea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South KoreaKorea Inst Ind Technol KITECH, Korea Addit Mfg Innovat Ctr KAMIC, Siheung Si, South Korea
机构:
Indian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, IndiaIndian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Singh, Gaurav Pratap
Jaiswal, Arun
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Indian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, IndiaIndian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Jaiswal, Arun
Joshi, Sarika
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Indian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Indian Inst Technol, IITB Monash Res Acad, Mumbai 400076, MH, IndiaIndian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Joshi, Sarika
Soni, Himanshu
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Indian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, IndiaIndian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Soni, Himanshu
Saxena, Sumit
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Indian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Indian Inst Technol, IITB Monash Res Acad, Mumbai 400076, MH, India
Indian Inst Technol, Water Innovat Ctr Technol Res & Educ, Mumbai 400076, MH, India
Indian Inst Technol, Ctr Res Nanotechnol & Sci, Mumbai 400076, MH, IndiaIndian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Saxena, Sumit
Shukla, Shobha
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Indian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
Indian Inst Technol, IITB Monash Res Acad, Mumbai 400076, MH, India
Indian Inst Technol, Water Innovat Ctr Technol Res & Educ, Mumbai 400076, MH, India
Indian Inst Technol, Ctr Res Nanotechnol & Sci, Mumbai 400076, MH, IndiaIndian Inst Technol, Dept Met Engn & Mat Sci, Nanostruct Engn & Modeling Lab, Mumbai 400076, Maharashtra, India
机构:
Yongjiang Lab, Ningbo 315202, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Lei, Yu
Sun, Wentao
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机构:
Nanjing Univ, Key Lab Intelligent Opt Sensing & Manipulat, Minist Educ, Nanjing 210093, Peoples R China
Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
Nanjing Univ, Coll Engn & Appl Sci, Nanjing 210093, Peoples R China
Nanjing Univ, Inst Opt Commun Engn, Nanjing 210093, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Sun, Wentao
Huang, Xiaolong
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机构:
Fujian Normal Univ, Coll Chem & Mat Sci, Fujian Prov Key Lab Adv Mat Oriented Chem Engn, Fuzhou 350007, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Huang, Xiaolong
Wang, Yan
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Yongjiang Lab, Ningbo 315202, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Wang, Yan
Gao, Jinling
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机构:
Nanjing Univ Aeronaut & Astronaut, State Key Lab Mech & Control Aerosp Struct, Nanjing 210016, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Gao, Jinling
Li, Xiaopei
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机构:
Fujian Normal Univ, Coll Chem & Mat Sci, Fujian Prov Key Lab Adv Mat Oriented Chem Engn, Fuzhou 350007, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Li, Xiaopei
Xiao, Rulei
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机构:
Nanjing Univ, Key Lab Intelligent Opt Sensing & Manipulat, Minist Educ, Nanjing 210093, Peoples R China
Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
Nanjing Univ, Coll Engn & Appl Sci, Nanjing 210093, Peoples R China
Nanjing Univ, Inst Opt Commun Engn, Nanjing 210093, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China
Xiao, Rulei
Deng, Biwei
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Yongjiang Lab, Ningbo 315202, Peoples R ChinaYongjiang Lab, Ningbo 315202, Peoples R China