Analytical Model for Gate-Induced Drain Leakage Current Degradation in Polycrystalline Silicon Thin-Film Transistors Under DC Drain Voltage Stress

被引:0
作者
Song, Yiming [1 ]
Zhang, Meng [2 ,3 ]
Jiang, Zhendong [2 ,3 ]
Wong, Man [4 ]
Kwok, Hoi-Sing
机构
[1] Shenzhen Univ, Inst Microscale Optoelect, Shenzhen 518060, Peoples R China
[2] Shenzhen Univ, State Key Lab Radio Frequency Heterogeneous Integr, Shenzhen 518060, Peoples R China
[3] Shenzhen Univ, Coll Elect & Informat Engn, Shenzhen 518060, Peoples R China
[4] Hong Kong Univ Sci & Technol, State Key Lab Adv Displays & Optoelect Technol, Hong Kong, Peoples R China
关键词
Degradation; Stress; Analytical models; Logic gates; Thin film transistors; Reliability; Silicon; Leakage currents; Electrodes; Stress measurement; Analytical model; gate-induced drain leakage; polycrystalline silicon (poly-Si); reliability; thin-film transistors (TFTs); LOW-TEMPERATURE POLYSILICON;
D O I
10.1109/TED.2024.3521926
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An analytical degradation model for gate-induced drain leakage current (I $_{\text{GIDL}}$ ) in polycrystalline silicon thin-film transistors (TFTs) under dc drain bias stress is proposed for the first time in this work. By analyzing the phenomenon of I $_{\text{GIDL}}$ degradation, the physical processes are systematically divided into four interrelated stages. Each stage's degradation parameters are modeled to develop a fixed charge model that accounts for stress time and stress voltage. Through deriving the corresponding expressions, the final degradation formula for I $_{\text{GIDL}}$ is obtained. Finally, the proposed model is validated through testing with varying stress time and stress voltages across different wafers.
引用
收藏
页码:705 / 711
页数:7
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