Crystal growth principles, methods, properties of silicon carbide and its new process prepared from silicon cutting waste

被引:0
作者
Zhang, Shengqian [1 ,2 ]
Ren, Yongsheng [1 ,2 ,3 ]
Yang, Xingwei [1 ,2 ]
Ma, Wenhui [4 ]
Chen, Hui [3 ,5 ]
Lv, Guoqiang [1 ,2 ]
Lei, Yun [1 ,2 ]
Zeng, Yi [1 ,2 ]
Wang, Zhengxing [1 ,2 ]
Yu, Bingxi [1 ,2 ]
机构
[1] Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Peoples R China
[2] Kunming Univ Sci & Technol, Natl Engn Res Ctr Vacuum Met, Kunming 650093, Peoples R China
[3] Univ Tokyo, Dept Mat Engn, Tokyo 1138656, Japan
[4] Yunnan Univ, Sch Engn, Kunming 650500, Peoples R China
[5] Zhejiang Huayou Cobalt Co, Inst Nonferrous Met Res, Quzhou 324012, Peoples R China
来源
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2025年 / 34卷
基金
中国国家自然科学基金;
关键词
Silicon carbide; Growth principles and methods; Crystal structure; Properties; Silicon cutting waste; CHEMICAL-VAPOR-DEPOSITION; SEEDED SOLUTION GROWTH; HIGH-SPEED GROWTH; DIAMOND-WIRE; SUBLIMATION GROWTH; 4H-SIC BULK; THERMAL-CONDUCTIVITY; GAS-PHASE; KERF-LOSS; TRANSPORT;
D O I
10.1016/j.jmrt.2024.12.239
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The third-generation semiconductor silicon carbide (SiC) has attracted widespread attention due to its excellent properties, such as high thermal conductivity, large bandgap, high breakdown field strength, and high saturation electronic drift rate, etc. Consequently, the growth process, physical structure, and properties of SiC crystals have also become research hotspots in industry and academia sectors. With the concept of carbon peak and carbon neutrality, the photovoltaic industry has witnessed rapid development. In the process of silicon wafer production, nearly half of the crystalline silicon is lost in the form of silicon powder into silicon cutting waste (SCW), which results in a great waste of resources and severe environmental pollution, and therefore the use of SCW for the preparation of SiC materials has received great attention in recent years. This paper highlights the principles and methods of SiC growth, crystal structure and properties, and discusses the application of SiC prepared from SCW.
引用
收藏
页码:2593 / 2608
页数:16
相关论文
共 172 条
[141]   A Near Ideal Edge Termination Technique for 4500V 4H-SiC Devices: The Hybrid Junction Termination Extension [J].
Sung, Woongje ;
Baliga, B. J. .
IEEE ELECTRON DEVICE LETTERS, 2016, 37 (12) :1609-1612
[142]   INVESTIGATION OF GROWTH PROCESSES OF INGOTS OF SILICON-CARBIDE SINGLE-CRYSTALS [J].
TAIROV, YM ;
TSVETKOV, VF .
JOURNAL OF CRYSTAL GROWTH, 1978, 43 (02) :209-212
[143]   Bayesian optimization for a high- and uniform-crystal growth rate in the top-seeded solution growth process of silicon carbide under applied magnetic field and seed rotation [J].
Takehara, Yuto ;
Sekimoto, Atsushi ;
Okano, Yasunori ;
Ujihara, Toru ;
Dost, Sadik .
JOURNAL OF CRYSTAL GROWTH, 2020, 532
[144]  
Tokuda Yuichiro, 2020, Materials Science Forum, V1004, P5, DOI 10.4028/www.scientific.net/MSF.1004.5
[145]   4H-SiC Bulk Growth Using High-Temperature Gas Source Method [J].
Tokuda, Y. ;
Kojima, J. ;
Hara, K. ;
Tsuchida, H. ;
Onda, S. .
SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, 2014, 778-780 :51-54
[146]   Advances in fast 4H-SiC crystal growth and defect reduction by high-temperature gas-source method [J].
Tsuchida, Hidekazu ;
Kanda, Takahiro .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2024, 176
[147]  
Tsunenobu K., 2014, Fundamentals of Silicon Carbide Technology: Growth, Characterization, Devices and Applications
[148]   Solution growth of high-quality 3C-SiC crystals [J].
Ujihara, Toru ;
Maekawa, Ryosuke ;
Tanaka, Ryo ;
Sasaki, Katsuhiro ;
Kuroda, Kotaro ;
Takeda, Yoshikazu .
JOURNAL OF CRYSTAL GROWTH, 2008, 310 (7-9) :1438-1442
[149]   Analysis of the carbon transport near the growth interface with respect to the rotational speed of the seed crystal during top-seeded solution growth of SiC [J].
Umezaki, Tomonori ;
Koike, Daiki ;
Harada, Shunta ;
Ujihara, Toru .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (12)
[150]  
Vodakov YA, 1997, PHYS STATUS SOLIDI B, V202, P177, DOI 10.1002/1521-3951(199707)202:1<177::AID-PSSB177>3.0.CO