Crystal growth principles, methods, properties of silicon carbide and its new process prepared from silicon cutting waste

被引:0
作者
Zhang, Shengqian [1 ,2 ]
Ren, Yongsheng [1 ,2 ,3 ]
Yang, Xingwei [1 ,2 ]
Ma, Wenhui [4 ]
Chen, Hui [3 ,5 ]
Lv, Guoqiang [1 ,2 ]
Lei, Yun [1 ,2 ]
Zeng, Yi [1 ,2 ]
Wang, Zhengxing [1 ,2 ]
Yu, Bingxi [1 ,2 ]
机构
[1] Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Peoples R China
[2] Kunming Univ Sci & Technol, Natl Engn Res Ctr Vacuum Met, Kunming 650093, Peoples R China
[3] Univ Tokyo, Dept Mat Engn, Tokyo 1138656, Japan
[4] Yunnan Univ, Sch Engn, Kunming 650500, Peoples R China
[5] Zhejiang Huayou Cobalt Co, Inst Nonferrous Met Res, Quzhou 324012, Peoples R China
来源
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2025年 / 34卷
基金
中国国家自然科学基金;
关键词
Silicon carbide; Growth principles and methods; Crystal structure; Properties; Silicon cutting waste; CHEMICAL-VAPOR-DEPOSITION; SEEDED SOLUTION GROWTH; HIGH-SPEED GROWTH; DIAMOND-WIRE; SUBLIMATION GROWTH; 4H-SIC BULK; THERMAL-CONDUCTIVITY; GAS-PHASE; KERF-LOSS; TRANSPORT;
D O I
10.1016/j.jmrt.2024.12.239
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The third-generation semiconductor silicon carbide (SiC) has attracted widespread attention due to its excellent properties, such as high thermal conductivity, large bandgap, high breakdown field strength, and high saturation electronic drift rate, etc. Consequently, the growth process, physical structure, and properties of SiC crystals have also become research hotspots in industry and academia sectors. With the concept of carbon peak and carbon neutrality, the photovoltaic industry has witnessed rapid development. In the process of silicon wafer production, nearly half of the crystalline silicon is lost in the form of silicon powder into silicon cutting waste (SCW), which results in a great waste of resources and severe environmental pollution, and therefore the use of SCW for the preparation of SiC materials has received great attention in recent years. This paper highlights the principles and methods of SiC growth, crystal structure and properties, and discusses the application of SiC prepared from SCW.
引用
收藏
页码:2593 / 2608
页数:16
相关论文
共 172 条
[101]   Thermodynamic analysis of the gas phase at the dissociative evaporation of silicon carbide [J].
Lilov, S.K. .
Computational Materials Science, 1993, 1 (04) :363-368
[102]   The study of crack damage and fracture strength for single crystal silicon wafers sawn by fixed diamond wire [J].
Liu, Tengyun ;
Ge, Peiqi ;
Bi, Wenbo ;
Gao, Yufei .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 134
[103]   The behavior of powder sublimation in the long-term PVT growth of SiC crystals [J].
Liu, Xi ;
Chen, Bo-Yuan ;
Song, Li-Xin ;
Shi, Er-Wei ;
Chen, Zhi-Zhan .
JOURNAL OF CRYSTAL GROWTH, 2010, 312 (09) :1486-1490
[104]   Deformation of 4H-SiC: The role of dopants [J].
Liu, Xiaoshuang ;
Zhang, Junran ;
Xu, Binjie ;
Lu, Yunhao ;
Zhang, Yiqiang ;
Wang, Rong ;
Yang, Deren ;
Pi, Xiaodong .
APPLIED PHYSICS LETTERS, 2022, 120 (05)
[105]   Study on Microstructure and Shear Property of Cu/In-xCu/Cu Transient Liquid Phase Bonding Joints [J].
Liu, Zheng ;
Yang, Li ;
Xu, Yu Hang ;
Zhang, Yao Cheng ;
Lu, Kai Jian ;
Xu, Feng ;
Gao, Hui Ming .
JOURNAL OF ELECTRONIC MATERIALS, 2021, 50 (01) :217-223
[106]  
Lu J, 2023, J Synth Cryst, P550, DOI [10.16553/j.cnki.issn1000-985x.20230224.002, DOI 10.16553/J.CNKI.ISSN1000-985X.20230224.002]
[107]   Removal mechanism of 4H-and 6H-SiC substrates (0001 and 0001 over bar ) in mechanical planarization machining [J].
Lu, Jing ;
Luo, Qiufa ;
Xu, Xipeng ;
Huang, Hui ;
Jiang, Feng .
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE, 2019, 233 (01) :69-76
[108]   Recycling of silicon powder waste cut by a diamond-wire saw through laser-assisted vacuum smelting [J].
Lu, Tong ;
Tan, Yi ;
Li, Jiayan ;
Deng, Dewei .
JOURNAL OF CLEANER PRODUCTION, 2018, 203 :574-584
[109]   Numerical Simulation of a Novel Method for PVT Growth of SiC by Adding a Graphite Block [J].
Luo, Hao ;
Han, Xuefeng ;
Huang, Yuanchao ;
Yang, Deren ;
Pi, Xiaodong .
CRYSTALS, 2021, 11 (12)
[110]   Modeling of silicon carbide crystal growth by physical vapor transport method [J].
Ma, RH ;
Chen, QS ;
Zhang, H ;
Prasad, V ;
Balkas, CM ;
Yushin, NK .
JOURNAL OF CRYSTAL GROWTH, 2000, 211 (1-4) :352-359