Silicon Nanomembrane Based Flexible Temperature-Bending Strain Dual-Mode Sensor Decoupled by Fast Fourier Transform

被引：2
作者：
Meng, Deyu [1 ]
Zhao, Haonan [1 ]
Wu, Xiaozhong [1 ]
Liu, Min [1 ]
Guo, Qinglei [1 ,2 ]
机构：
[1] Shandong Univ, Sch Integrated Circuits, Jinan 250100, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Mat Integrated Circuits, Shanghai 200050, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2024年 / 45卷 / 12期
关键词：
Silicon nanomembrane; strain sensor; temperature sensor; decoupling; human health monitoring; PRESSURE; DIOXIDE;
D O I：
10.1109/LED.2024.3481255
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Flexible dual-mode sensors that are capable of simultaneously sensing temperature and strain exhibit huge prospects in applications such as health monitoring, human-computer interaction, and intelligent robots. However, decoupling different stimuli accurately still faces severe challenges. In this study, we present a silicon based flexible dual-mode sensor that can be seamlessly attached to human body, enabling precise and real-time acquisition of physiological temperature and strain signals. The fabricated device only contains one sensing unit, with good sensing performances to both temperature and bending strain, including good linearity, high sensitivity, low hysteresis, and long-term stability. In various application scenarios, the fabricated dual-mode sensor can be utilized to monitor respiration, pulse, and body temperature. Moreover, due to different specific response times to temperature and strain, pulse and temperature signals obtained from the wrist can be successfully decoupled through the fast Fourier transform (FFT) and inverse FFT. These presented results offer significant potentials for the development of skin-inspired electronics with simple device structures and multifunctional capabilities.
引用
收藏
页码：2518 / 2521
页数：4
相关论文
共 28 条
  • [1] Chen J., Zhu Y., Chang X., Pan D., Song G., Guo Z., Naik N., Recent progress in essential functions of soft electronic skin, Adv. Funct. Mater., 31, 42, (2021)
  • [2] Wen N., Fan Z., Yang S., Guo Y., Zhang J., Lei B., Zhao Y., Cong T., Li C., Jing Z., Pan L., Highly stretchable, breathable, and self-powered strain-temperature dual-functional sensors with laminated structure for health monitoring, hyperthermia, and physiotherapy applications, Adv. Electron. Mater., 8, 11, (2022)
  • [3] Liao F., Lu C., Yao G., Yan Z., Gao M., Pan T., Zhang Y., Feng X., Lin Y., Ultrasensitive flexible temperature-mechanical dual-parameter sensor based on vanadium dioxide films, IEEE Electron Device Lett., 38, 8, pp. 1128-1131, (2017)
  • [4] Gao F., Min P., Ma Q., Zhang T., Yu Z., Shang J., Li R., Li X., Multifunctional thermoelectric temperature sensor for noncontact information transfer and tactile sensing in human-machine interaction, Adv. Funct. Mater., 34, 1, (2023)
  • [5] Ma X., Wang C., Wei R., He J., Li J., Liu X., Huang F., Ge S., Tao J., Yuan Z., Chen P., Peng D., Pan C., Bimodal tactile sensor without signal fusion for user-interactive applications, ACS Nano, 16, 2, pp. 2789-2797, (2022)
  • [6] Dai X., Wu Y., Liang Q., Yang J., Huang L., Kong J., Hao J., Soft robotic-adapted multimodal sensors derived from entirely intrinsic self-healing and stretchable cross-linked networks, Adv. Funct. Mater., 33, 44, (2023)
  • [7] Shih B., Shah D., Li J., Thuruthel T.G., Park Y.-L., Iida F., Bao Z., Kramer-Bottiglio R., Tolley M.T., Electronic skins and machine learning for intelligent soft robots, Sci. Robot., 5, 41, (2020)
  • [8] Yang R., Zhang W., Tiwari N., Yan H., Li T., Cheng H., Multimodal sensors with decoupled sensing mechanisms, Adv. Sci., 9, 26, (2022)
  • [9] Wang C., Xia K., Zhang M., Jian M., Zhang Y., An allsilk-derived dual-mode E-skin for simultaneous temperature-pressure detection, ACS Appl. Mater. Interfaces, 9, 45, pp. 39484-39492, (2017)
  • [10] Zhang C., Wu M., Cao S., Liu M., Guo D., Kang Z., Li M., Ye D., Yang Z., Wang X., Xie Z., Liu J., Bioinspired environment-adaptable and ultrasensitive multifunctional electronic skin for human healthcare and robotic sensations, Small, 19, 41, (2023)
123