A method of optimisation in modelling and design of solidly mounted resonator (SMR) by using Finite Element Method

被引：0

作者：

Yang, Yang ^{[1
]}

Dejous, Corinne ^{[1
]}

Hallil, Hamida ^{[1
]}

机构：

[1] Univ Bordeaux, CNRS, Bordeaux INP, IMS,UMR 5218, F-33400 Talence, France

来源：

2022 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, DTIP | 2022年

关键词：

Piezoelectric transducers; Piezoelectric devices; Solidly Mounted Resonator; Finite Element Method; Sensor application;

D O I：

10.1109/DTIP56576.2022.9911747

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The film bulk acoustic resonator (FBAR) is an emerging piezoelectric device, widely spreading for sensing applications and in many commercial products like cell phones for its high working frequency and small size. This work presents a complete approach for the modeling and design of a ZnO-based Solidly Mounted Resonator (SMR) in 2D and 3D models. The finite element method was used to perform its simulation at the frequency range from 1 to 3 GHz. In addition, in order to suppress or minimize horizontal parasitic modes, the geometry of the electrodes has been optimized by comparing the pentagonal and the rectangular shapes. Finally, the size of the models has been reduced to save computing resources by setting symmetry boundary conditions.

引用

页数：4

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