Nanocrystalline diamond films;
Microstructure;
Electron field emission;
Edge related emission density;
Transmission electron microscopy;
NANOCRYSTALLINE DIAMOND;
EMISSION PROPERTIES;
MICROWAVE PLASMA;
GROWTH-BEHAVIOR;
CVD DIAMOND;
RAMAN;
D O I:
10.1016/j.vacuum.2025.114029
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Microwave plasma is an effective source for synthesizing diamond films, but the geometry of the deposition is severely affected by the plasma distribution. In this context, advanced microwave plasma jet chemical vapor deposition (MPJ-CVD) offers a more efficient, energy-saving, and uniform method for diamond deposition leading to more stable films across various substrate geometries. Previous work shows that diamonds synthesized by microwave plasma tend to have larger grain sizes and surface roughness which limit device applications. In this study, we achieve a breakthrough in diamond synthesis by adjusting the dilute methane/hydrogen ratio from 0.25 % to 4 % which can significantly reduce diamond grains, increasing edge density and enhance field emission performance. This enhancement is attributed to the primary source of electron field emission being the diamond edges allowing us to assume a mechanism called "edge related emission density (ERED)" where increasing the edge density of diamonds enhances the field emission current density. The turn-on electric field decreases from 6.56 V/mu m to 5.44 V/mu m while the current density increases from 47 to similar to 585 mu A/cm(2) (at E = 8 V/mu m). This ensures sufficient current density to drive optoelectronic devices within the range of low turn-on and control voltages, thereby improving device reliability and control precision.
机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Xidian Univ, Wuhu Res Inst, Wuhu 241002, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Li, Jun-Peng
Ren, Ze-Yang
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Xidian Univ, Wuhu Res Inst, Wuhu 241002, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Ren, Ze-Yang
Zhang, Jin-Feng
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Xidian Univ, Wuhu Res Inst, Wuhu 241002, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Zhang, Jin-Feng
Wang, Han-Xue
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Wang, Han-Xue
Ma, Yuan-Chen
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Xidian Univ, Wuhu Res Inst, Wuhu 241002, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Ma, Yuan-Chen
Fei, Yi-Fan
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h-index: 0
机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Xidian Univ, Wuhu Res Inst, Wuhu 241002, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Fei, Yi-Fan
Huang, Si-Yuan
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Xidian Univ, Wuhu Res Inst, Wuhu 241002, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Huang, Si-Yuan
Ding, Sen-Chuan
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Ding, Sen-Chuan
Zhang, Jin-Cheng
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h-index: 0
机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
Zhang, Jin-Cheng
Hao, Yue
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机构:
Xidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R ChinaXidian Univ, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
机构:
Department of Mechanical Engineering, University of South Florida, Tampa, FL 33620Department of Mechanical Engineering, University of South Florida, Tampa, FL 33620
Gomez, Humberto
Kumar, Ashok
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机构:
Department of Electrical Engineering, University of South Florida, Tampa, FL 33620Department of Mechanical Engineering, University of South Florida, Tampa, FL 33620
Kumar, Ashok
Jeedigunta, Sathyaharish
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机构:
Department of Electrical Engineering, University of South Florida, Tampa, FL 33620Department of Mechanical Engineering, University of South Florida, Tampa, FL 33620