Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment

被引：0

作者：

Li, Ke ^{[1
,2
]}

Wang, Yongjie ^{[1
,2
]}

Li, Gaochao ^{[1
,2
]}

Xu, Zhen ^{[1
,2
]}

Liu, Yuanyuan ^{[3
,4
]}

Shi, Ancun ^{[1
]}

Yu, Xiaoyan ^{[5
]}

Li, Fang ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, State Key Lab Transducer Technol, Beijing 100083, Peoples R China

[2] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China

[3] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China

[4] Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China

[5] Minist Nat Resource, Natl Ctr Ocean Stand & Metrol, Technol Innovat Ctr Marine Metrol & Instruments Te, Tianjin 300112, Peoples R China

来源：

PHOTONICS | 2025年 / 12卷 / 03期

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

MEMS; Fabry-P & eacute; rot; optical fiber sensors; high-pressure sensing; temperature compensation; LONG-TERM STABILITY; MICRO-CAVITY;

D O I：

10.3390/photonics12030258

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. A spectral extraction and filtering algorithm, based on FFT (fast Fourier transform), was designed to independently demodulate the composite spectra of multiple FP (Fabry-P & eacute;rot) cavities, enabling the simultaneous measurement of pressure and temperature parameters. The sensor was fabricated by etching on an SOI (silicon on insulator) and bonding with glass to form pressure-sensitive FP cavities, with the glass itself serving as the temperature-sensitive component as well as providing temperature compensation for pressure sensing. Experimental results showed that within the pressure range of 0-100 MPa, the sensor exhibited a sensitivity of 0.566 nm/MPa, with a full-scale error of 0.34%, and a linear fitting coefficient (R2) greater than 0.9999. Within the temperature range of 0-160 degrees C, the temperature sensitivity of the glass cavity is 0.0139 nm/degrees C and R2 greater than 0.999.

引用

页数：18

共 34 条

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