Modern microelectronics has transitioned from planar metal-oxide-semiconductor transistors to finFETs to nanowire FETs, and most recently to nanosheet (NS) FETs, in which the channel is composed of a group of gate-all-around thin layers of silicon or a substitute material. It has been suggested that some two-dimensional materials may be used to replace the silicon in these NS FETs. While such two-dimensional materials have been studied over the past couple of decades, they have questionable properties for this application. In fact, it is pointed out here that silica itself may be a more suitable material for use in NS transistors. The properties of silica are discussed, and comparisons with other materials are given. It is shown that silica has a number of advantageous properties for use as a NS, provided that more research can establish viable methods of controlling required dopants for active layers.
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City Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R ChinaCity Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R China
Wang, Wenbin
Zhai, Wei
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City Univ Hong Kong, Dept Chem, Hong Kong, Peoples R ChinaCity Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R China
Zhai, Wei
Chen, Ye
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Chinese Univ Hong Kong, Dept Chem, Shatin, Hong Kong, Peoples R ChinaCity Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R China
Chen, Ye
He, Qiyuan
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City Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R ChinaCity Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R China
He, Qiyuan
Zhang, Hua
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City Univ Hong Kong, Dept Chem, Hong Kong, Peoples R China
City Univ Hong Kong, Hong Kong Branch, Natl Precious Met Mat Engn Res Ctr NPMM, Hong Kong, Peoples R China
City Univ Hong Kong, Shenzhen Res Inst, Shenzhen 518057, Peoples R ChinaCity Univ Hong Kong, Dept Mat Sci & Engn, Hong Kong, Peoples R China
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Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Sino Danish Coll, Sino Danish Ctr Educ & Res, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Xin, Kaiyao
Wang, Xingang
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Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Sino Danish Coll, Sino Danish Ctr Educ & Res, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Wang, Xingang
Grove-Rasmussen, Kasper
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Univ Copenhagen, Niels Bohr Inst, Ctr Quantum Devices, DK-2100 Copenhagen O, Denmark
Univ Copenhagen, Niels Bohr Inst, Nanosci Ctr, DK-2100 Copenhagen O, Denmark
Univ Chinese Acad Sci, Sino Danish Coll, Sino Danish Ctr Educ & Res, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Grove-Rasmussen, Kasper
Wei, Zhongming
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Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Sino Danish Coll, Sino Danish Ctr Educ & Res, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
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Yonsei Univ, IPAP, Room 240, Seoul 03722, South KoreaYonsei Univ, IPAP, Room 240, Seoul 03722, South Korea
Choi, Kyunghee
Lee, Young Tack
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Korea Inst Sci & Technol, Postsilicon Semicond Inst, Ctr Optoelect Mat & Devices, Seoul 02792, South KoreaYonsei Univ, IPAP, Room 240, Seoul 03722, South Korea
Lee, Young Tack
Im, Seongil
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Yonsei Univ, IPAP, Room 240, Seoul 03722, South KoreaYonsei Univ, IPAP, Room 240, Seoul 03722, South Korea