Silica as a two-dimensional material for nano-electronics

被引:0
|
作者
Ferry, David K. [1 ]
机构
[1] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA
关键词
ultra-thin layer; electron mobility; conductivity; field-effect transistor; nanosheet transistor; POLAR PHONON-SCATTERING; ROOM-TEMPERATURE; DIFFUSION; CHARGE; TRANSPORT; BREAKDOWN; MOBILITY; DIOXIDE; SIO2; NANOTECHNOLOGY;
D O I
10.1088/1361-6641/adaa97
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Modern microelectronics has transitioned from planar metal-oxide-semiconductor transistors to finFETs to nanowire FETs, and most recently to nanosheet (NS) FETs, in which the channel is composed of a group of gate-all-around thin layers of silicon or a substitute material. It has been suggested that some two-dimensional materials may be used to replace the silicon in these NS FETs. While such two-dimensional materials have been studied over the past couple of decades, they have questionable properties for this application. In fact, it is pointed out here that silica itself may be a more suitable material for use in NS transistors. The properties of silica are discussed, and comparisons with other materials are given. It is shown that silica has a number of advantageous properties for use as a NS, provided that more research can establish viable methods of controlling required dopants for active layers.
引用
收藏
页数:12
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