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Silica as a two-dimensional material for nano-electronics
被引:0
|作者:
Ferry, David K.
[1
]
机构:
[1] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA
关键词:
ultra-thin layer;
electron mobility;
conductivity;
field-effect transistor;
nanosheet transistor;
POLAR PHONON-SCATTERING;
ROOM-TEMPERATURE;
DIFFUSION;
CHARGE;
TRANSPORT;
BREAKDOWN;
MOBILITY;
DIOXIDE;
SIO2;
NANOTECHNOLOGY;
D O I:
10.1088/1361-6641/adaa97
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Modern microelectronics has transitioned from planar metal-oxide-semiconductor transistors to finFETs to nanowire FETs, and most recently to nanosheet (NS) FETs, in which the channel is composed of a group of gate-all-around thin layers of silicon or a substitute material. It has been suggested that some two-dimensional materials may be used to replace the silicon in these NS FETs. While such two-dimensional materials have been studied over the past couple of decades, they have questionable properties for this application. In fact, it is pointed out here that silica itself may be a more suitable material for use in NS transistors. The properties of silica are discussed, and comparisons with other materials are given. It is shown that silica has a number of advantageous properties for use as a NS, provided that more research can establish viable methods of controlling required dopants for active layers.
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页数:12
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