Hysteresis modeling and compensation of one-dimensional piezoelectric driven positioning stage based on PI model

被引：0

作者：

Qin, Zicheng ^{[1
]}

An, Dong ^{[1
]}

Wang, Chuan ^{[1
]}

Li, Ji ^{[1
]}

Shao, Meng ^{[1
]}

Xing, Shuangyun ^{[1
]}

机构：

[1] Shenyang Jianzhu Univ, Sch Mech Engn, Shenyang, Liaoning, Peoples R China

来源：

2024 14TH ASIAN CONTROL CONFERENCE, ASCC 2024 | 2024年

关键词：

PI model; EHysteretic nonlinearity; EFeedforward compensation; ENano-positioning stage;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The hysteretic nonlinear characteristics of the nanopositioning stage based on piezoelectric ceramic actuator seriously affect its tracking and positioning accuracy. As the one-dimensional piezoelectric driven positioning stage studied in this paper has single-loop hysteresis characteristics, the feedforward compensation control method based on the traditional PI model is used. The experimental results confirm that the input and output of the positioning stage show a relatively good linear relationship. The maximum position of the compensated nanopositioning stage relative to the ideal state is 0.042%.

引用

页码：454 / 458

页数：5