A wideband push-pull Φ2 amplifier with PCB inductors and Rogowski coils for RF plasma generators

被引：1

作者：

Chen, Sida ^{[1
]}

Gu, Lei ^{[1
]}

机构：

[1] Univ Penn, Philadelphia, PA 19104 USA

来源：

2024 IEEE 25TH WORKSHOP ON CONTROL AND MODELING FOR POWER ELECTRONICS, COMPEL 2024 | 2024年

关键词：

Rogowski coil; plasma generation; PCB inductor; push-pull Phi(2); power amplifier; zero-voltage switching (ZVS);

D O I：

10.1109/COMPEL57542.2024.10613998

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Inductively coupled plasma (ICP) is a common source needed in semiconductor manufacturing. Driven by fast-changing RF electrical signals, high-power ICP is generated inside the vacuum chamber for wafer processing. The printed circuit board is a mature manufacturing technology with low-cost, robust, and easy-controlled results. Here, we demonstrate a 13.56 MHz, 100 W, push-pull Phi(2) resonant amplifier for ICP applications and a Rogowski coil-based current sensor for feedback control.

引用

页数：6

共 12 条

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[2]

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[3]

Brouk V., 2004, P ANN TECHN C SOC VA

[4]

Gu L., 2020, IEEE Transactions on Power Electronics, V35, p10 515

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