Editorial for focus on emerging processes and applications of atomic and molecular layer deposition

被引：0

作者：

Meng, Xiangbo ^{[1
]}

Elam, Jeffrey W. ^{[2
]}

Barry, Sean ^{[3
]}

机构：

[1] Univ Arkansas, Dept Mech Engn, Fayetteville, AR 72701 USA

[2] Appl Mat Div, Argonne Natl Lab, Lemont, IL 60439 USA

[3] Carleton Univ, Dept Chem, Ottawa, ON K1S 5B6, Canada

来源：

NANOTECHNOLOGY | 2025年 / 36卷 / 09期

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1088/1361-6528/ad9d4b

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This Focus aims to provide a platform for the latest research progress in atomic and molecular layer deposition (ALD and MLD), which collects 10 original research articles and 2 review papers. The original research articles present new precursors, new processes, and new applications. The review papers give a timely summary on the surface chemistry of metal ALD processes and flexible electronics resulting from ALD and MLD, respectively. This ensemble forms a valuable collection that advances our understanding and knowledge of ALD and MLD, and inspires the continued development of these valuable technologies.

引用

页数：5

共 50 条

[31] Mechanistic details of atomic layer deposition (ALD) processes
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Tiznado, Hugo
Kang, Byung-Chang
Bouman, Menno
Lee, Ilkeun
Zaera, Francisco
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[32] Recent Developments of Atomic Layer Deposition Processes for Metallization
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[33] Atomic layer deposition of chalcogenide thin films: processes, film properties, applications, and bibliometric prospect
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[34] Membrane Fabrication and Modification by Atomic Layer Deposition: Processes and Applications in Water Treatment and Gas Separation
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[36] Atomic Layer Deposition of Pb(Zr,Ti)Ox Thin Films by a Combination of Binary Atomic Layer Deposition Processes
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[38] Chemical Vapor Deposition and Atomic Layer Deposition of Coatings for Mechanical Applications
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[39] Editorial for focus on manipulations of atomic and molecular layers and its applications in energy, environment sciences and optoelectronic devices
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[40] Electrocatalysts by atomic layer deposition for fuel cell applications
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