Ultrasensitive Detection of Hg2+ Ions With CVD Grown MoS2-Functionalized MgZnO/CdZnO HEMT

被引:0
作者
Chaudhary, Sumit [1 ]
Mahapatra, Brahmadutta [1 ]
Pandey, Vikas [2 ]
Patel, Chandrabhan [1 ]
Dubey, Mayank [1 ]
Kumar, Mahesh [2 ]
Mukherjee, Shaibal [3 ,4 ,5 ]
机构
[1] Hybrid Nanodevice Res Grp HNRG, Indian Inst Technol Indore, Dept Elect Engn, Indore 453552, India
[2] Indian Inst Technol Jodhpur, Interdisciplinary Res Program Space Sci & Technol, Jodhpur 342030, India
[3] Indian Inst Technol Indore, Dept Elect Engn, Hybrid Nanodevice Res Grp HNRG, Indore 453552, Madhya Pradesh, India
[4] Indian Inst Technol Indore, Ctr Adv Elect CAE, Indore 453552, Madhya Pradesh, India
[5] RMIT Univ, Sch Engn, Melbourne, Vic 3001, Australia
关键词
Ions; Mercury (metals); HEMTs; Sensors; Silicon; Logic gates; Substrates; Sensitivity; Metals; Optical sensors; Chemical vapor deposition (CVD); Hg2+; high-electron-mobility transistor (HEMT); molybdenum disulfide (MoS2); selectivity; sensitivity; MOLYBDENUM-DISULFIDE; MERCURY; SENSOR; WATER; ADSORPTION;
D O I
10.1109/JSEN.2024.3504842
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mercury (Hg) is generally renowned as one of the most dangerous heavy metals, even at trace levels. Its presence can lead to both chronic and acute poisoning, causing severe health issues such as cancer, rheumatoid arthritis, and movement disorders, potentially resulting in death. Current mercury detection systems have several limitations, including slow response times, high costs, and poor portability. In this study, an oxide-based high-electron-mobility transistor sensor has been fabricated by optical lithography and a dual ion beam sputtering (DIBS) system, and it is investigated as a potential sensor for detecting trace amounts of Hg2+ ions in water. Molybdenum disulfide (MoS2) was synthesized via a chemical vapor deposition (CVD) system and transferred to the gate of the MgZnO/CdZnO (MCO) HEMT using an energy-assisted wet transfer method, functionalizing the gate region for Hg2+ ion detection. The fabricated sensor demonstrated excellent selectivity for Hg2+ ions, an outstanding detection limit of 6.5 ppt, a fast response time of lower than 4 s, and an excellent sensitivity of 9.55 mu A/ppb.
引用
收藏
页码:2048 / 2055
页数:8
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