Fabrication of Porous SiC Coatings on Quartz Substrates by Laser Chemical Vapor Deposition

被引：0

作者：

杨梅君 ^{[1
]}

CHEN Rui ^{[2
]}

徐青芳 ^{[1
]}

GUO Bingjian ^{[2
]}

LIU Kai ^{[2
]}

TU Rong ^{[1
]}

ZHANG Song ^{[1
]}

机构：

[1] State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology

[2] School of Materials Science and Engineering, Wuhan University of Technology

来源：

Journal of Wuhan University of Technology(Materials Science) | 2025年 / 40卷 / 02期

关键词：

D O I：

暂无

中图分类号：

TB306 [];

学科分类号：

0805 ; 080502 ;

摘要：

Laser etching and laser chemical vapor deposition (LCVD) techniques were proposed for the rapid preparation of high-purity,strongly bonded SiC porous micro-nano-coatings on quartz substrates.The laser serves as an external driving force for the vertical growth of SiC whiskers,facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world.The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress.It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.

引用

页码：330 / 337

页数：8

共 24 条

[21] Properties and characteristics of wet (HF) and dry (RIE) etched borosilicate glass [J].