Micron-scale imaging using bulk ultrasonics

被引:1
|
作者
Chandran, Loheshwaran [1 ]
Syed Akbar Ali, Mohamed Subair [1 ]
Bobbs, Bradley [3 ]
Dutta, Chandan [1 ]
Joseph, J. D. [2 ]
Bhattacharya, Enakshi [2 ]
Rajagopal, Prabhu [1 ,2 ]
机构
[1] Indian Inst Technol Madras, Ctr Nondestruct Evaluat CNDE, Chennai 600036, Tamil Nadu, India
[2] Indian Inst Technol Madras, Ctr NEMS & Nanophoton CNNP, Chennai 600036, Tamil Nadu, India
[3] Intelligent Opt Syst Inc, 19601 Mariner Ave, Torrance, CA 90503 USA
来源
SCIENTIFIC REPORTS | 2024年 / 14卷 / 01期
关键词
Sub-wavelength imaging; Micro metamaterial; Periodic holey structures; Rayleigh diffraction limitation; Acoustic microscopy;
D O I
10.1038/s41598-024-72634-2
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
An extraordinary resolution down to 50 microns is demonstrated for the first time for bulk ultrasonics, using novel micro-fabricated metamaterial lenses. The development and performance of the silicon-based Fabry-Perot type metalenses with an array of 10 micrometre square holes are discussed. Challenges in wave reception are addressed by a custom-developed micro-focal laser with a sub-micron spot size and an innovative experimental set-up together with physics based signal processing. The results provide a pathway for material diagnostics at greater depths with high resolution using micro-metalens-enhanced ultrasound as an alternative to expensive and radiation prone electromagnetic techniques.
引用
收藏
页数:20
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