Multi-beam multi-slice X-ray ptychography

被引:0
作者
Astrand, Mattias [1 ]
Vogt, Ulrich [1 ]
Yang, Runqing [2 ,3 ]
Perez, Pablo Villanueva [3 ]
Li, Tang [4 ]
Lyubomirskiy, Mikhail [2 ]
Kahnt, Maik [2 ]
机构
[1] Albanova Univ Ctr, KTH Royal Inst Technol, Dept Appl Phys Bioopto Nano Phys, S-10691 Stockholm, Sweden
[2] Lund Univ, MAX Lab 4, Box 118, S-22100 Lund, Sweden
[3] Lund Univ, Dept Phys, Synchrotron Radiat Res, Box 118, S-22100 Lund, Sweden
[4] Deutsch Elektronen Synchrotron DESY, Ctr X ray & Nano Sci CXNS, Notkestr 85, D-22607 Hamburg, Germany
来源
SCIENTIFIC REPORTS | 2025年 / 15卷 / 01期
基金
瑞典研究理事会;
关键词
Ptychography; Multi-beam; Multi-slice;
D O I
10.1038/s41598-025-93757-0
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
X-ray ptychography provides the highest resolution non-destructive imaging at synchrotron radiation facilities, and the efficiency of this method is crucial for coping with limited experimental time. Recent advancements in multi-beam ptychography have enabled larger fields of view, but spatial resolution for large 3D samples remains constrained by their thickness, requiring consideration of multiple scattering events. Although this challenge has been addressed using multi-slicing in conventional ptychography, the integration of multi-slicing with multi-beam ptychography has not yet been explored. Here we present the first successful combination of these two methods, enabling high-resolution imaging of nanofeatures at depths comparable to the lateral dimensions that can be addressed by state-of-the-art multi-beam ptychography. Our approach is robust, reproducible across different beamlines, and ready for broader application. It marks a significant advancement in the field, establishing a new foundation for high-resolution 3D imaging of larger, thicker samples.
引用
收藏
页数:7
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共 50 条
[1]   High-performance 4-nm-resolution X-ray tomography using burst ptychography [J].
Aidukas, Tomas ;
Phillips, Nicholas W. ;
Diaz, Ana ;
Poghosyan, Emiliya ;
Muller, Elisabeth ;
Levi, A. F. J. ;
Aeppli, Gabriel ;
Guizar-Sicairos, Manuel ;
Holler, Mirko .
NATURE, 2024, 632 (8023) :81-+
[2]  
Astrand M., 2024, **DATA OBJECT**, DOI 10.5281/zenodo.13628121
[3]  
Astrand M., 2023, International Society for Optics and Photonics (SPIE, V12698
[4]   Adaptive multi-beam X-ray ptychography [J].
Astrand, Mattias ;
Kahnt, Maik ;
Johansson, Ulf ;
Vogt, Ulrich .
OPTICS EXPRESS, 2024, 32 (13) :22771-22780
[5]   Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers [J].
Astrand, Mattias ;
Frisk, Thomas ;
Ohlin, Hanna ;
Vogt, Ulrich .
MICRO AND NANO ENGINEERING, 2022, 16
[6]   Multiple beam ptychography for large field-of-view, high throughput, quantitative phase contrast imaging [J].
Bevis, Charles ;
Karl, Robert, Jr. ;
Reichanadter, Jonathan ;
Gardner, Dennis F. ;
Porter, Christina ;
Shanblatt, Elisabeth ;
Tanksalvala, Michael ;
Mancini, Giulia F. ;
Kapteyn, Henry ;
Murnane, Margaret ;
Adams, Daniel .
ULTRAMICROSCOPY, 2018, 184 :164-171
[7]   Fast X-ray ptychography: towards nanoscale imaging of large volume of brain [J].
Cipiccia, Silvia ;
Fratini, Michela ;
Erin, Ecem ;
Palombo, Marco ;
Vogel, Silvia ;
Burian, Max ;
Zhou, Fenglei ;
Parker, Geoff J. M. ;
Batey, Darren J. .
EUROPEAN PHYSICAL JOURNAL PLUS, 2024, 139 (05)
[8]   EIGER2 hybrid-photon-counting X-ray detectors for advanced synchrotron diffraction experiments [J].
Donath, Tilman ;
Jung, Dubravka Sisak ;
Burian, Max ;
Radicci, Valeria ;
Zambon, Pietro ;
Fitch, Andrew N. ;
Dejoie, Catherine ;
Zhang, Bingbing ;
Ruat, Marie ;
Hanfland, Michael ;
Kewish, Cameron M. ;
van Riessen, Grant A. ;
Naumenko, Denys ;
Amenitsch, Heinz ;
Bourenkov, Gleb ;
Bricogne, Gerard ;
Chari, Ashwin ;
Schulze-Briese, Clemens .
JOURNAL OF SYNCHROTRON RADIATION, 2023, 30 :723-738
[9]   Sparsely sampled Fourier ptychography [J].
Dong, Siyuan ;
Bian, Zichao ;
Shiradkar, Radhika ;
Zheng, Guoan .
OPTICS EXPRESS, 2014, 22 (05) :5455-5464
[10]   Three dimensions, two microscopes, one code: Automatic differentiation for x-ray nanotomography beyond the depth of focus limit [J].
Du, Ming ;
Nashed, Youssef S. G. ;
Kandel, Saugat ;
Gursoy, Doga ;
Jacobsen, Chris .
SCIENCE ADVANCES, 2020, 6 (13)