Fundamental study of surface generation in robot-assisted polishing of optical components

被引:0
|
作者
Zhao, Zejia [1 ,2 ,4 ]
Xiong, Jing [2 ]
Li, Lai [1 ,2 ]
Wang, Haoyu [1 ,2 ]
Lin, Jiatian [1 ,2 ]
Zhu, Liu [3 ]
Guo, Dengji [1 ,4 ,5 ]
Wang, Xujin [1 ,2 ,4 ]
机构
[1] Shenzhen Univ, Inst Semicond Mfg Res, Shenzhen 518060, Peoples R China
[2] Shenzhen Univ, Coll Mechatron & Control Engn, Shenzhen 518060, Peoples R China
[3] Vital Mat Co Ltd, Guangzhou 510623, Peoples R China
[4] Shenzhen Univ, Inst Semicond Mfg Res, State Key Lab Radio Frequency Heterogeneous Integr, Shenzhen 518060, Peoples R China
[5] Shenzhen Univ, Coll Mechatron & Control Engn, Shenzhen Key Lab High Performance Nontradit Mfg, Shenzhen 518060, Peoples R China
来源
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2025年
基金
中国国家自然科学基金;
关键词
Robot-assisted polishing; Optical components; Polishing model; Surface generation mechanism; WEAR;
D O I
10.1007/s00170-025-15261-z
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Robot-assisted polishing methods have attracted much interest as a replacement for specialized and costly computer numerical control (CNC) polishing tools to achieve high-precision polishing of optical components. This study theoretically and experimentally investigates the surface generation mechanism in the robot-assisted polishing of optical glass. The contact pressure distribution between the polishing head and workpiece is simulated using finite-element software based on the Hertz contact theory and geometric models. A polishing model is proposed based on the Preston theory and experimental results, and the Preston coefficient k of the model is fitted. Subsequently, the local speed of the polishing head in the contact area is analyzed to provide an accurate evaluation of the material removal profile. To realize optimal polishing conditions, polishing experiments with various parameters are conducted in one area without feeding the workpiece. The results of robot-assisted polishing experiments on the entire surface of the workpiece showed mirror surface quality and improved profile accuracy. The obtained results not only clarify the surface generation mechanism in robot-assisted polishing but also highlight the need for further studies of high-precision and low-cost polishing systems of optical components, contributing to the widespread availability of optical devices in industrial applications.
引用
收藏
页码:2221 / 2235
页数:15
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