Novel Method for Extracting Electromagnetic Parameters of Thin Films Based on Dual-Mode Terahertz Time-Domain Spectroscopy Measurements

被引：0
作者：
Konnikova, Maria [1 ,2 ]
Tretyakov, Akim [2 ]
Kistenev, Yury [2 ]
Coutaz, Jean-Louis [3 ]
Ozheredov, Iliya [1 ]
Shkurinov, Alexander [1 ]
机构：
[1] Lomonosov Moscow State Univ, Fac Phys, Moscow 119991, Russia
[2] Tomsk State Univ, Lab Laser Mol Imaging & Machine Learning, Tomsk 634050, Russia
[3] Univ Savoie Mt Blanc, Univ Grenoble Alpes, CNRS, Grenoble INP.CROMA, F-38000 Grenoble, France
来源：
JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES | 2025年 / 46卷 / 03期
关键词：
Thin films; THz-TDS; Transmission; Reflection; Complex refractive index; Material characterization; DIELECTRIC-CONSTANT MEASUREMENT; REFRACTIVE-INDEX; TRANSMISSION; FUNDAMENTALS; PROPAGATION; NOISE;
D O I：
10.1007/s10762-025-01040-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The article describes a new method for determining the complex dielectric permittivity of films, whose thickness is much smaller than the terahertz (THz) radiation wavelength. This method is based on the simultaneous measurement of THz waveforms reflected by and transmitted through the sample-containing films (dual-mode configuration). We present analytical and numerical solutions of the Maxwell equations, which allow to precisely and easily determine the complex material parameters of the films for transverse electric (TE) and transverse magnetic (TM) polarization cases for the arbitrary incident angle of the THz beam. The proposed method reduces the noise contribution related to laser fluctuation, which improves the precision determination of the dielectric permittivity.
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页数：19
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