Silicon Nanowire-Based Metal-Semiconductor-Metal (MSM) Device for Photodetection Applications

被引:0
|
作者
Kumar, Anand [1 ]
Kashyap, Vikas [2 ]
Kumar, Chandra [3 ]
Poria, Kanishk [2 ]
Sharma, Avadhesh Kumar [1 ]
Saxena, Kapil [4 ]
机构
[1] Invertis Univ, Dept Appl Sci & Humanities, Bareilly 243001, Uttar Pradesh, India
[2] Panjab Univ, Dept Phys, Chandigarh 160014, India
[3] Univ Mayor, Escuela Ingn, Fac Ciencias Ingn & Tecnol, Santiago 7500994, Chile
[4] Kamla Nehru Inst Technol, Dept Appl Sci & Humanities, Sultanpur 228118, Uttar Pradesh, India
关键词
Silicon; Nanowires; Etching; Substrates; X-ray scattering; Chemicals; Surface treatment; Silicon dioxide; Oxidation; Hydrogen; I-V measurements; metal-assisted chemical etching (MACE) method; photodetection; silicon nanowires (SiNWs); transient response; SI NANOWIRES; PERFORMANCE;
D O I
10.1109/JSEN.2025.3535087
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study investigates the fabrication of silicon nanowires (SiNWs) through the n-type silicon using the metal-assisted chemical etching (MACE) technique for photodetection applications. The synthesized SiNWs underwent comprehensive material characterization using field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), atomic force microscopy (AFM), and Fourier-transform infrared spectroscopy (FTIR). These analyses confirmed the uniformity and purity of the nanowires. Electrical measurements, specifically I-V characteristics, were conducted to evaluate the conductivity, carrier mobility, and electronic properties of the SiNWs. A metal-semiconductor-metal (MSM) device has been fabricated incorporating these SiNWs and shows the high current density with 1- 5 mu A current at +/- 5 V. Moreover, the device shows a good photoresponse with enhanced photocurrent 7.5 and 6.1 mu A at +5 and -5 V, respectively, under 650 W/m(2) optical illumination. Furthermore, the MSM device demonstrates a very prompt risetime ( T-Rise ) of 1.25 s and a falltime ( T-Fall ) of 2.7 s under 650 W/m(2) illuminations. The results underscore the potential of MACE-grown SiNWs in developing high-performance photodetectors, emphasizing their suitability for integration into advanced optoelectronic devices. These findings highlight the promising capabilities of SiNWs in photodetection, paving the way for their application in next-generation optoelectronic technologies.
引用
收藏
页码:10211 / 10217
页数:7
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