Silicon Nanowire-Based Metal-Semiconductor-Metal (MSM) Device for Photodetection Applications

被引:0
|
作者
Kumar, Anand [1 ]
Kashyap, Vikas [2 ]
Kumar, Chandra [3 ]
Poria, Kanishk [2 ]
Sharma, Avadhesh Kumar [1 ]
Saxena, Kapil [4 ]
机构
[1] Invertis Univ, Dept Appl Sci & Humanities, Bareilly 243001, Uttar Pradesh, India
[2] Panjab Univ, Dept Phys, Chandigarh 160014, India
[3] Univ Mayor, Escuela Ingn, Fac Ciencias Ingn & Tecnol, Santiago 7500994, Chile
[4] Kamla Nehru Inst Technol, Dept Appl Sci & Humanities, Sultanpur 228118, Uttar Pradesh, India
关键词
Silicon; Nanowires; Etching; Substrates; X-ray scattering; Chemicals; Surface treatment; Silicon dioxide; Oxidation; Hydrogen; I-V measurements; metal-assisted chemical etching (MACE) method; photodetection; silicon nanowires (SiNWs); transient response; SI NANOWIRES; PERFORMANCE;
D O I
10.1109/JSEN.2025.3535087
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study investigates the fabrication of silicon nanowires (SiNWs) through the n-type silicon using the metal-assisted chemical etching (MACE) technique for photodetection applications. The synthesized SiNWs underwent comprehensive material characterization using field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), atomic force microscopy (AFM), and Fourier-transform infrared spectroscopy (FTIR). These analyses confirmed the uniformity and purity of the nanowires. Electrical measurements, specifically I-V characteristics, were conducted to evaluate the conductivity, carrier mobility, and electronic properties of the SiNWs. A metal-semiconductor-metal (MSM) device has been fabricated incorporating these SiNWs and shows the high current density with 1- 5 mu A current at +/- 5 V. Moreover, the device shows a good photoresponse with enhanced photocurrent 7.5 and 6.1 mu A at +5 and -5 V, respectively, under 650 W/m(2) optical illumination. Furthermore, the MSM device demonstrates a very prompt risetime ( T-Rise ) of 1.25 s and a falltime ( T-Fall ) of 2.7 s under 650 W/m(2) illuminations. The results underscore the potential of MACE-grown SiNWs in developing high-performance photodetectors, emphasizing their suitability for integration into advanced optoelectronic devices. These findings highlight the promising capabilities of SiNWs in photodetection, paving the way for their application in next-generation optoelectronic technologies.
引用
收藏
页码:10211 / 10217
页数:7
相关论文
共 50 条
  • [31] Through silicon via based metal-semiconductor-metal photodetector in CMOS technology
    Pil-Ali, Abdollah
    Karami, Mohammad Azim
    OPTICAL AND QUANTUM ELECTRONICS, 2016, 48 (01) : 1 - 9
  • [32] White Noise in silicon-based planar metal-semiconductor-metal photodiodes
    Khunkhao, S.
    Nanthivatana, P.
    Niemcharoen, S.
    Titiroongruang, W.
    Sato, K.
    Ruangphanit, A.
    Phongphanchanthra, N.
    ECTI-CON 2008: PROCEEDINGS OF THE 2008 5TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING/ELECTRONICS, COMPUTER, TELECOMMUNICATIONS AND INFORMATION TECHNOLOGY, VOLS 1 AND 2, 2008, : 809 - +
  • [33] Carrier Dynamics Analysis in Metal-Semiconductor-Metal Device for mid-IR Silicon Photonics
    Hui, Alvin Tak Lok
    Ding, Yunhong
    Hu, Hao
    Galili, Michael
    2017 IEEE 14TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP), 2017, : 69 - 70
  • [34] Assessment of GaN metal-semiconductor-metal photodiodes for high-energy ultraviolet photodetection
    Monroy, E
    Palacios, T
    Hainaut, O
    Omnès, F
    Calle, F
    Hochedez, JF
    APPLIED PHYSICS LETTERS, 2002, 80 (17) : 3198 - 3200
  • [35] Resonant-cavity-enhanced UV metal-semiconductor-metal (MSM) photodetectors based on AlGaN system
    Kishino, K
    Yonemaru, M
    Kikuchi, A
    Toyoura, Y
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2001, 188 (01): : 321 - 324
  • [36] Multiplication of photocurrent in silicon planar metal-semiconductor-metal structures
    Khunkhao, S.
    Titiroongruang, W.
    Niemcharoen, S.
    Ruangphanit, A.
    Phongphanchanthra, N.
    Sato, Kazunori
    ECTI-CON: 2009 6TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING/ELECTRONICS, COMPUTER, TELECOMMUNICATIONS AND INFORMATION TECHNOLOGY, VOLS 1 AND 2, 2009, : 417 - +
  • [37] A 75 GHZ SILICON METAL-SEMICONDUCTOR-METAL SCHOTTKY PHOTODIODE
    ALEXANDROU, S
    WANG, CC
    HSIANG, TY
    LIU, MY
    CHOU, SY
    APPLIED PHYSICS LETTERS, 1993, 62 (20) : 2507 - 2509
  • [38] Metal-semiconductor-metal Ge photodetectors integrated in silicon waveguides
    Vivien, Laurent
    Marris-Morini, Delphine
    Fedeli, Jean-Marc
    Rouviere, Mathieu
    Damlencourt, Jean-Francois
    El Melhaoui, Loubna
    Le Roux, Xavier
    Crozat, Paul
    Mangeney, Juliette
    Cassan, Eric
    Laval, Suzanne
    APPLIED PHYSICS LETTERS, 2008, 92 (15)
  • [39] A silicon metal-semiconductor-metal photodetector macromodel for circuit simulations
    Pancheri, L
    Scandiuzzo, M
    Dalla Betta, GF
    Stoppa, D
    De Nisi, F
    Gonzo, L
    Simoni, A
    SOLID-STATE ELECTRONICS, 2005, 49 (02) : 175 - 181
  • [40] 32 GHZ METAL-SEMICONDUCTOR-METAL PHOTODETECTORS ON CRYSTALLINE SILICON
    CHOU, SY
    LIU, Y
    CARRUTHERS, TF
    APPLIED PHYSICS LETTERS, 1992, 61 (15) : 1760 - 1762