Silicon Nanowire-Based Metal-Semiconductor-Metal (MSM) Device for Photodetection Applications

被引:0
|
作者
Kumar, Anand [1 ]
Kashyap, Vikas [2 ]
Kumar, Chandra [3 ]
Poria, Kanishk [2 ]
Sharma, Avadhesh Kumar [1 ]
Saxena, Kapil [4 ]
机构
[1] Invertis Univ, Dept Appl Sci & Humanities, Bareilly 243001, Uttar Pradesh, India
[2] Panjab Univ, Dept Phys, Chandigarh 160014, India
[3] Univ Mayor, Escuela Ingn, Fac Ciencias Ingn & Tecnol, Santiago 7500994, Chile
[4] Kamla Nehru Inst Technol, Dept Appl Sci & Humanities, Sultanpur 228118, Uttar Pradesh, India
关键词
Silicon; Nanowires; Etching; Substrates; X-ray scattering; Chemicals; Surface treatment; Silicon dioxide; Oxidation; Hydrogen; I-V measurements; metal-assisted chemical etching (MACE) method; photodetection; silicon nanowires (SiNWs); transient response; SI NANOWIRES; PERFORMANCE;
D O I
10.1109/JSEN.2025.3535087
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study investigates the fabrication of silicon nanowires (SiNWs) through the n-type silicon using the metal-assisted chemical etching (MACE) technique for photodetection applications. The synthesized SiNWs underwent comprehensive material characterization using field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), atomic force microscopy (AFM), and Fourier-transform infrared spectroscopy (FTIR). These analyses confirmed the uniformity and purity of the nanowires. Electrical measurements, specifically I-V characteristics, were conducted to evaluate the conductivity, carrier mobility, and electronic properties of the SiNWs. A metal-semiconductor-metal (MSM) device has been fabricated incorporating these SiNWs and shows the high current density with 1- 5 mu A current at +/- 5 V. Moreover, the device shows a good photoresponse with enhanced photocurrent 7.5 and 6.1 mu A at +5 and -5 V, respectively, under 650 W/m(2) optical illumination. Furthermore, the MSM device demonstrates a very prompt risetime ( T-Rise ) of 1.25 s and a falltime ( T-Fall ) of 2.7 s under 650 W/m(2) illuminations. The results underscore the potential of MACE-grown SiNWs in developing high-performance photodetectors, emphasizing their suitability for integration into advanced optoelectronic devices. These findings highlight the promising capabilities of SiNWs in photodetection, paving the way for their application in next-generation optoelectronic technologies.
引用
收藏
页码:10211 / 10217
页数:7
相关论文
共 50 条
  • [21] Simulation of the Metal-Semiconductor-Metal photodetector based on InAIAs/GaAsSb for the photodetection at the wavelength 1.3 μm
    Aissat, Abdelkader
    El Besseghi, Mourad
    Decoster, Didier
    2014 INTERNATIONAL CONFERENCE ON MULTIMEDIA COMPUTING AND SYSTEMS (ICMCS), 2014, : 1392 - 1397
  • [22] Spectral Response of Metal-Semiconductor-Metal Photodetector Based on Black Silicon
    Su Yuanjie
    Jiang Yadong
    Wu Zhiming
    Zhao Guodong
    PROCEEDINGS OF INTERNATIONAL CONFERENCE ON SMART GRID AND CLEAN ENERGY TECHNOLOGIES (ICSGCE 2011), 2011, 12
  • [23] Metal-semiconductor-metal (MSM) photodetectors based on single-walled carbon nanotube film-silicon Schottky contacts
    Behnam, Ashkan
    Johnson, Jason L.
    Choi, Yongho
    Ertosun, M. Guenhan
    Wu, Zhuangchun
    Rinzler, Andrew G.
    Kapur, Pawan
    Saraswat, Krishna C.
    Ural, Ant
    MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS V. - SPECIAL FOCUS TOPICS: TRANSDUCERS AT THE MICRO-NANO INTERFACE, 2008, 6885
  • [24] Ageing mediated silicon suboxide interlayer growth in porous silicon: p-Si heterostructured metal-semiconductor-metal device for enhanced UV-visible photodetection
    Sarmah, S.
    Das, M.
    Sarkar, D.
    THIN SOLID FILMS, 2021, 738
  • [25] Metal-Semiconductor-Metal GeSn Photodetectors on Silicon for Short-Wave Infrared Applications
    Ghosh, Soumava
    Lin, Kuan-Chih
    Tsai, Cheng-Hsun
    Kumar, Harshvardhan
    Chen, Qimiao
    Zhang, Lin
    Son, Bongkwon
    Tan, Chuan Seng
    Kim, Munho
    Mukhopadhyay, Bratati
    Chang, Guo-En
    MICROMACHINES, 2020, 11 (09)
  • [26] Optimization of metal-semiconductor-metal (MSM) photodetector arrays integrated with polyimide waveguides
    Callender, CL
    Robitaille, L
    Noad, JP
    Gouin, F
    Almeida, C
    EMERGING COMPONENTS AND TECHNOLOGIES FOR ALL-OPTICAL PHOTONIC SYSTEMS II, 1997, 2918 : 211 - 221
  • [27] Optical-electronic simulation of a GaAs metal-semiconductor-metal (MSM) photodetectors
    Korner, TO
    Yoder, PD
    Bomholt, LH
    Fichtner, W
    SISPAD '96 - 1996 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 1996, : 47 - 48
  • [28] Cryogenic processed metal-semiconductor-metal (MSM) photodetectors on MBE grown ZnSe
    Hong, H
    Anderson, WA
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (06) : 1127 - 1134
  • [29] Enhanced Responsivity of GaN Metal-Semiconductor-Metal (MSM) Photodetectors on GaN Substrate
    Chang, Siyi
    Chang, Mengting
    Yang, Yingping
    IEEE PHOTONICS JOURNAL, 2017, 9 (02):
  • [30] Through silicon via based metal-semiconductor-metal photodetector in CMOS technology
    Abdollah Pil-Ali
    Mohammad Azim Karami
    Optical and Quantum Electronics, 2016, 48