Chip-scale sensor for spectroscopic metrology

被引:0
|
作者
Yao, Chunhui [1 ,2 ]
Zhang, Wanlu [1 ]
Bao, Peng [1 ]
Ma, Jie [2 ]
Zhuo, Wei [2 ]
Chen, Minjia [1 ]
Shi, Zhitian [1 ]
Zhou, Jingwen [2 ]
Ye, Yuxiao [2 ]
Ming, Liang [2 ]
Yan, Ting [2 ]
Penty, Richard [1 ]
Cheng, Qixiang [1 ,2 ]
机构
[1] Univ Cambridge, Dept Engn, Elect Engn Div, Cambridge, England
[2] GlitterinTech Ltd, Xuzhou, Peoples R China
基金
欧盟地平线“2020”; 英国工程与自然科学研究理事会;
关键词
NEAR-INFRARED SPECTROSCOPY; BLOOD-GLUCOSE; IN-VIVO; GASOLINE; COMPACT; LACTATE; SAMPLES; AIR;
D O I
10.1038/s41467-024-54708-x
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.
引用
收藏
页数:11
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