Validation of three-dimensional simulation of beam transport using linear accelerator based on measured phase-space distributions

This study validated beam transport simulations using a test bench to enhance the productivity of high-energy ion implanters. The results confirmed the validity of the beam transport simulations in the low-current region. It is anticipated that a beam transport similar to that predicted by simulations can be achieved in an actual high-energy ion implanter. Consequently, the time required to establish an implantation process can be significantly reduced using simulations.