Validation of three-dimensional simulation of beam transport using linear accelerator based on measured phase-space distributions

被引：0

作者：

Hirai, Yuma ^{[1
]}

Saito, Yugo ^{[1
]}

Sasaki, Haruka ^{[1
]}

机构：

[1] Sumitomo Heavy Ind Ion Technol Co Ltd, 1501 Imazaike, Saijo, Ehime, Japan

来源：

MRS ADVANCES | 2025年 / 10卷 / 02期

关键词：

Photons - Transport properties;

D O I：

10.1557/s43580-025-01119-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This study validated beam transport simulations using a test bench to enhance the productivity of high-energy ion implanters. The results confirmed the validity of the beam transport simulations in the low-current region. It is anticipated that a beam transport similar to that predicted by simulations can be achieved in an actual high-energy ion implanter. Consequently, the time required to establish an implantation process can be significantly reduced using simulations.

引用

页码：220 / 224

页数：5

共 5 条

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