Failure mechanisms of AlGaN/GaN HEMTs irradiated by high-energy heavy ions with and without bias

被引:0
|
作者
Hu, Pei-Pei [1 ,2 ,3 ]
Xu, Li-Jun [1 ,3 ]
Zhang, Sheng-Xia [1 ,3 ]
Zhai, Peng-Fei [1 ,3 ]
Lv, Ling [2 ]
Yan, Xiao-Yu [1 ,3 ]
Li, Zong-Zhen [1 ,3 ]
Cao, Yan-Rong [2 ]
Zheng, Xue-Feng [2 ]
Zeng, Jian [1 ,2 ]
He, Yuan [1 ,3 ]
Liu, Jie [1 ,3 ]
机构
[1] Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China
[2] Xidian Univ, Key Lab Wide Band gap Semicond Mat, Minist Educ, Xian 710071, Peoples R China
[3] Univ Chinese Acad Sci UCAS, Beijing 100049, Peoples R China
关键词
GaN HEMTs; Heavy ions; Single-event burnout; Latent tracks; Degradation; SINGLE-EVENT BURNOUT; DISPLACEMENT DAMAGE; GAN FILMS; SEMICONDUCTORS; DEGRADATION; DEFECTS; DEVICES; LEAKAGE; TRACK;
D O I
10.1007/s41365-024-01567-2
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
Gallium nitride (GaN)-based devices have significant potential for space applications. However, the mechanisms of radiation damage to the device, particularly from strong ionizing radiation, remains unknown. This study investigates the effects of radiation on p-gate AlGaN/GaN high-electron-mobility transistors (HEMTs). Under a high voltage, the HEMT leakage current increased sharply and was accompanied by a rapid increase in power density that caused "thermal burnout" of the devices. In addition, a burnout signature appeared on the surface of the burned devices, proving that a single-event burnout effect occurred. Additionally, degradation, including an increase in the on-resistance and a decrease in the breakdown voltage, was observed in devices irradiated with high-energy heavy ions and without bias. The latent tracks induced by heavy ions penetrated the heterojunction interface and extended into the GaN layer. Moreover, a new type of N2 bubble defect was discovered inside the tracks using Fresnel analysis. The accumulation of N2 bubbles in the heterojunction and buffer layers is more likely to cause leakage and failure. This study indicates that electrical stress accelerates the failure rate and that improving heat dissipation is an effective reinforcement method for GaN-based devices.
引用
收藏
页数:10
相关论文
共 36 条
  • [1] Effects of Applied Bias and High Field Stress on the Radiation Response of GaN/AlGaN HEMTs
    Chen, Jin
    Puzyrev, Yevgeniy S.
    Jiang, Rong
    Zhang, En Xia
    McCurdy, Michael W.
    Fleetwood, Daniel M.
    Schrimpf, Ronald D.
    Pantelides, Sokrates T.
    Arehart, Aaron R.
    Ringel, Steven A.
    Saunier, Paul
    Lee, Cathy
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2015, 62 (06) : 2423 - 2430
  • [2] Effect of gate dielectrics on characteristics of high-energy proton-irradiated AlGaN/GaN MISHEMTs
    Lee, Jun-Hyeok
    Kim, Dong-Seok
    Kim, Jeong-Gil
    Ahn, Woo-Hyun
    Bae, Youngho
    Lee, Jung-Hee
    RADIATION PHYSICS AND CHEMISTRY, 2021, 184
  • [3] Characterisation and modelling of parasitic effects and failure mechanisms in AlGaN/GaN HEMTs
    Malbert, N.
    Labat, N.
    Curutchet, A.
    Sury, C.
    Hoel, V.
    de Jaeger, J. -C.
    Defrance, N.
    Douvry, Y.
    Dua, C.
    Oualli, M.
    Bru-Chevallier, C.
    Bluet, J. -M.
    Chikhaoui, W.
    MICROELECTRONICS RELIABILITY, 2009, 49 (9-11) : 1216 - 1221
  • [4] AlGaN/GaN-Based HEMTs Failure Physics and Reliability: Mechanisms Affecting Gate Edge and Schottky Junction
    Zanoni, Enrico
    Meneghini, Matteo
    Chini, Alessandro
    Marcon, Denis
    Meneghesso, Gaudenzio
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (10) : 3119 - 3131
  • [5] Electrostatic Mechanisms Responsible for Device Degradation in Proton Irradiated AlGaN/AIN/GaN HEMTs
    Kalavagunta, A.
    Touboul, A.
    Shen, L.
    Schrimpf, R. D.
    Reed, R. A.
    Fleetwood, D. M.
    Jain, R. K.
    Mishra, U. K.
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2008, 55 (04) : 2106 - 2112
  • [6] Effect of Ultraviolet Radiation on Polyethylene Naphthalate Films Irradiated with High-Energy Heavy Ions
    Molokanova, L. G.
    Kochnev, Yu. K.
    Nechaev, A. N.
    Chukova, S. N.
    Apel, P. Yu.
    HIGH ENERGY CHEMISTRY, 2017, 51 (03) : 182 - 188
  • [7] Effect of ultraviolet radiation on polyethylene naphthalate films irradiated with high-energy heavy ions
    L. G. Molokanova
    Yu. K. Kochnev
    A. N. Nechaev
    S. N. Chukova
    P. Yu. Apel
    High Energy Chemistry, 2017, 51 : 182 - 188
  • [8] Single-Event Damages Caused by Heavy Ions Observed in AlGaN/GaN HEMTs
    Kuboyama, Satoshi
    Maru, Akifumi
    Shindou, Hiroyuki
    Ikeda, Naomi
    Hirao, Toshio
    Abe, Hiroshi
    Tamura, Takashi
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2011, 58 (06) : 2734 - 2738
  • [9] Degradation mechanisms of AlGaN/GaN HEMTs under 800 MeV Bi ions irradiation
    Lei, Z. F.
    Guo, H. X.
    Tang, M. H.
    Zeng, C.
    Zhang, Z. G.
    Chen, H.
    En, Y. F.
    Huang, Y.
    Chen, Y. Q.
    Peng, C.
    MICROELECTRONICS RELIABILITY, 2018, 80 : 312 - 316
  • [10] Electrical Characteristics of High-Power AlGaN-GaN High Electron Mobility Transistors Irradiated with Protons and Heavy Ions
    Sin, Yongkun
    Bonsall, Jeremy
    Lingley, Zachary
    Brodie, Miles
    Mason, Maribeth
    GALLIUM NITRIDE MATERIALS AND DEVICES XII, 2017, 10104