MEMS/NEMS for Biosensing [Guest Editorial]

With the rapid development of nanotechnology and micro/nanofabrication, scientists are able to create a great diversity of Micro-Electro-Mechanical Systems (MEMS) /Nano-Electro-Mechanical Systems (NEMS) which have benefited various fields from industry to biomedical engineering. As a new multidisciplinary part of MEMS/NEMS, the BioMEMS/BioNEMS (e.g., biosensor and microfluidics) have attracted flourishing interests over the past few decades and provided new insights for the biomedical research due to the offered special advantages of low device cost, small sample consumption, high integration, high efficiency, and high precision. For example, various novel BioMEMS/BioNEMS devices have been successfully developed to separate and detect microscale cells and nanoscale biomarkers for biomedical research and disease diagnosis.